Emissivity Independent Process Control in a Short Wavelength ARC Lamp RTP Chamber

1996 ◽  
Vol 429 ◽  
Author(s):  
Marcel E. Lefrançois ◽  
David M. Camm ◽  
Brendon J. Hickson

AbstractTwo dimensional temperature measurements of patterned wafers are presented. The measurements are made using a commercially available CCD camera operating at λ=900nm, yielding a spatial resolution of 1 pixel per mm2 and a relative accuracy of ±0.25 °C. The emissivity is determined using a reflectivity measurement made possible by the unique properties of a short wavelength arc lamp RTP chamber. The use of this measurement system for closed loop control is discussed and the application to maintaining accurate time temperature profiles independent of emissivity is described.

Author(s):  
Vivek G. Badami ◽  
Susan S. Hefner ◽  
Stuart T. Smith

Abstract In this paper, a two dimensional wavelet analysis using Daubechies D14 wavelets has been used to decompose an Atomic Force Microscope image of the surface of a two dimensional calibration grid. Operating the microscope in open loop mode results in image distortions due to nonlinearities of the scanning mechanism which are subsequently reduced under closed loop control. Such distortions in the image are not readily apparent even using Fourier transform techniques and may be overlooked in a routine calibration. Through an appropriate choice of sample length so that the periodicity of the grid is coincident with the bandpass cut-off of the wavelet transform, it is shown in this paper that distortions can be clearly identified in individual levels of the wavelet reconstruction.


2012 ◽  
Vol 220 (1) ◽  
pp. 3-9 ◽  
Author(s):  
Sandra Sülzenbrück

For the effective use of modern tools, the inherent visuo-motor transformation needs to be mastered. The successful adjustment to and learning of these transformations crucially depends on practice conditions, particularly on the type of visual feedback during practice. Here, a review about empirical research exploring the influence of continuous and terminal visual feedback during practice on the mastery of visuo-motor transformations is provided. Two studies investigating the impact of the type of visual feedback on either direction-dependent visuo-motor gains or the complex visuo-motor transformation of a virtual two-sided lever are presented in more detail. The findings of these studies indicate that the continuous availability of visual feedback supports performance when closed-loop control is possible, but impairs performance when visual input is no longer available. Different approaches to explain these performance differences due to the type of visual feedback during practice are considered. For example, these differences could reflect a process of re-optimization of motor planning in a novel environment or represent effects of the specificity of practice. Furthermore, differences in the allocation of attention during movements with terminal and continuous visual feedback could account for the observed differences.


Diabetes ◽  
2019 ◽  
Vol 68 (Supplement 1) ◽  
pp. 118-LB
Author(s):  
CAROL J. LEVY ◽  
GRENYE OMALLEY ◽  
SUE A. BROWN ◽  
DAN RAGHINARU ◽  
YOGISH C. KUDVA ◽  
...  

Diabetes ◽  
2020 ◽  
Vol 69 (Supplement 1) ◽  
pp. 101-LB
Author(s):  
SUE A. BROWN ◽  
DAN RAGHINARU ◽  
BRUCE A. BUCKINGHAM ◽  
YOGISH C. KUDVA ◽  
LORI M. LAFFEL ◽  
...  

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