Simultaneous Spatially Resolved Multispectral Optical Emission Of Sputter Processes

1995 ◽  
Vol 406 ◽  
Author(s):  
J. D. Klein ◽  
S. L. Clauso
Keyword(s):  
Magnetron Sputtering ◽  
Optical Spectroscopy ◽  
Optical Emission ◽  
Gas Composition ◽  
Spatially Resolved ◽  
Product Film ◽  
Spectroscopy System ◽  
Chamber Gas ◽  
Single Plasma

AbstractAn optical spectroscopy system was configured to monitor several plasma positions at the same time. The system allows monitoring of several points within a single plasma. Magnetron sputtering of YBa2Cu3O7 (YBCO) in a reduction-oxidation (redox) environment provided a process in which both cation and gas species are vital in determining the quality of the product film. Spatial sampling of the sputter plasma defined a disparity in the manner in which Ba and Cu emissions respond to changes in chamber gas composition. Oxygen emissions were found to respond quickly to inlet gas composition while Cu emissions were notably sluggish.

Preparation of TiN Films by Magnetron Sputtering and Diagnostics for Optical Emission of Magnetron Plasma.

Shinku ◽  
1995 ◽  
Vol 38 (3) ◽  
pp. 339-342 ◽  
Author(s):  
Yasuki AIHARA ◽  
Yuko HIROHATA ◽  
Tomoaki HINO ◽  
Toshiro YAMASHINA
Keyword(s):  
Magnetron Sputtering ◽  
Optical Emission ◽  
Tin Films

ZnCdO/ZnMgO and ZnO/AlGaN Heterostructures for UV and Visible Light Emitters

2005 ◽  
Vol 892 ◽  
Author(s):  
Andrei Osinsky ◽  
Jianwei Dong ◽  
J. Q. Xie ◽  
B. Hertog ◽  
A. M. Dabiran ◽  
...  
Keyword(s):  
Molecular Beam ◽  
Compositional Analysis ◽  
Optical Emission ◽  
Rf Plasma ◽  
Light Emitters ◽  
Time Resolved ◽  
Light Emitting ◽  
Spatially Resolved ◽  
Time Resolved Photoluminescence ◽  
Made In

AbstractThis paper reviews of some of the progress made in the development of ZnO-based light emitting diodes (LEDs). n-ZnO/p-AlGaN-based heterostructures have been successfully for the fabrication of UV emitting LEDs that have operated at temperatures up to 650K, suggesting an excitonic origin for the optical transitions. RF-plasma-assisted molecular beam epitaxy has been used to grow epitaxial CdxZn1-xO films on GaN/sapphire structure. These films have a single-crystal wurtzite structure as demonstrated by structural and compositional analysis. High quality CdxZn1-xO films were grown with up to x=0.78 mole fraction as determined by RBS and SIMS techniques. Optical emission ranging from purple (Cd0.05Zn0.95O) to yellow (Cd0.29Zn0.71O) was observed. Compositional fluctuations in a Cd0.16Zn0.84O films were not detected by spatially resolved CL measurements, although intensity fluctuation with features of ∼0.5 μm diameter were seen on the intensity maps. Time resolved photoluminescence shows multi-exponential decay with 21 psec. and 49±3 psec. lifetimes, suggesting that composition micro-fluctuations may be present in Cd0.16Zn0.84O film.

EFFECT OF TEMPERATURE AND GAS COMPOSITION ON QUALITY OF GARLIC BULBS

2007 ◽  
pp. 77-82 ◽  
Author(s):  
D. Nei ◽  
N. Nakamura ◽  
H. Umehara ◽  
P. Roy ◽  
H. Okadome ◽  
...  
Keyword(s):  
Effect Of Temperature ◽  
Gas Composition

scholarly journals Relevance for food sciences of quantitative spatially resolved element profile investigations in wheat ( Triticum aestivum ) grain

2013 ◽  
Vol 10 (84) ◽  
pp. 20130296 ◽  
Author(s):  
Paula Pongrac ◽  
Ivan Kreft ◽  
Katarina Vogel-Mikuš ◽  
Marjana Regvar ◽  
Mateja Germ ◽  
...  
Keyword(s):  
Triticum Aestivum ◽  
Inductively Coupled Plasma ◽  
Optical Emission ◽  
Tissue Level ◽  
Emission Spectrometry ◽  
Bulk Analysis ◽  
Inductively Coupled ◽  
Element Concentrations ◽  
Spatially Resolved ◽  
Soil Zn

Bulk element concentrations of whole grain and element spatial distributions at the tissue level were investigated in wheat ( Triticum aestivum ) grain grown in Zn-enriched soil. Inductively coupled plasma mass spectrometry and inductively coupled plasma optical emission spectrometry were used for bulk analysis, whereas micro-proton-induced X-ray emission was used to resolve the two-dimensional localization of the elements. Soil Zn application did not significantly affect the grain yield, but did significantly increase the grain Ca, Fe and Zn concentrations, and decrease the grain Na, P and Mo concentrations; bulk Mg, S, K, Mn, Cu, Cd and Pb concentrations remained unchanged. These changes observed in bulk element concentrations are the reflection of tissue-specific variations within the grain, revealing that Zn application to soil can lead to considerable alterations in the element distributions within the grain, which might ultimately influence the quality of the milling fractions. Spatially resolved investigations into the partitioning of the element concentrations identified the tissues with the highest element concentrations, which is of utmost importance for accurate prediction of element losses during the grain milling and polishing processes.

scholarly journals Influence of modulation frequency on the synthesis of thin films in pulsed magnetron sputtering processes

2018 ◽  
Vol 36 (4) ◽  
pp. 697-703 ◽  
Author(s):  
G.W. Strzelecki ◽  
K. Nowakowska-Langier ◽  
R. Chodun ◽  
S. Okrasa ◽  
B. Wicher ◽  
...  
Keyword(s):  
Magnetron Sputtering ◽  
Optical Emission Spectroscopy ◽  
Film Growth ◽  
Modulation Frequency ◽  
Optical Emission ◽  
Pulsed Power ◽  
Additional Parameter ◽  
The Impact ◽  
Different Levels ◽  
Pulsed Magnetron

AbstractThe research on the influence of modulation frequency on the properties of films synthesized using a unique pulsed power supply combined with a standard unbalanced circular magnetron was conducted in the process of pulsed magnetron sputtering (PMS). It was shown that by using different levels of modulation, the composition of plasma (measured by optical emission spectroscopy, OES) as well as film growth rate and morphology (observed with scanning electron microscope, SEM), can be changed. The impact of modulation is related to the used materials and gases and can vary significantly. It was concluded that modulation frequency can greatly influence the synthesis of materials and can be used as an additional parameter in PMS. Specific relations between modulation frequency and synthesized material require further investigation.

scholarly journals Spatially resolved optical spectroscopy in extreme environment of low temperature, high magnetic fields and high pressure

2021 ◽  
Vol 92 (12) ◽  
pp. 123909
Author(s):  
I. Breslavetz ◽  
A. Delhomme ◽  
T. Pelini ◽  
A. Pawbake ◽  
D. Vaclavkova ◽  
...  
Keyword(s):  
High Pressure ◽  
Low Temperature ◽  
Magnetic Fields ◽  
Optical Spectroscopy ◽  
Extreme Environment ◽  
High Magnetic Fields ◽  
Spatially Resolved
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