Spatially resolved optical emission studies of pulsed D.C. plasmas for TiN deposition by unbalanced magnetron sputtering

2005 ◽  
Vol 475 (1-2) ◽  
pp. 6-11 ◽  
Author(s):  
Soo-ghee Oh ◽  
Yong-mo Kim ◽  
Jeon-gun Han
Keyword(s):  
Magnetron Sputtering ◽  
Optical Emission ◽  
Spatially Resolved ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron ◽  
Emission Studies

scholarly journals Effect of Boron and Oxygen on the Structure and Properties of Protective Decorative Cr–Al–Ti–N Coatings Deposited by Closed Field Unbalanced Magnetron Sputtering (CFUBMS)

2019 ◽  
Vol 9 (22) ◽  
pp. 4977
Author(s):  
Ph. V. Kiryukhantsev-Korneev ◽  
Zh. S. Amankeldina ◽  
A. N. Sheveyko ◽  
S. Vorotilo ◽  
E. A. Levashov
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Optical Emission ◽  
Closed Field ◽  
Structural Refinement ◽  
Columnar Growth ◽  
Electrochemical Testing ◽  
Unbalanced Magnetron Sputtering ◽  
High Temperature Synthesis ◽  
Unbalanced Magnetron

Boron and oxygen-doped Cr–Al–Ti–N coatings were deposited by closed field unbalanced magnetron sputtering (CFUBMS) of TiB target manufactured by self-propagating high-temperature synthesis, and Ti, Cr, and Al targets. To evaluate the influence of doping elements, as-deposited coatings were studied by glow discharge optical emission spectroscopy (GDOES), SEM, XRD, and optical profilometry. Mechanical properties were measured by nanoindentation and tribological, abrasive and electrochemical testing. The introduction of boron suppresses columnar growth and leads to structural refinement and a decrease of coating’s surface roughness. The addition of 2.3 at.% boron results in the highest mechanical properties: hardness H = 15 GPa, stable friction coefficient f = 0.65, and specific wear Vw = 7.5 × 10−6 mm3N−1m−1. To make the coating more visually appealing, oxygen was introduced in the chamber near the end of the deposition cycle. Upper Cr–Al–Ti–B–O–N layers were studied in terms of their composition and coloration, and the developed two-layer decorative coatings were deposited on cast metallic art pieces.

Electrical properties of ZnO-based photodetector prepared by room temperature DC unbalanced magnetron sputtering

2016 ◽  
Author(s):  
Eka Nurfani ◽  
Angga Virdian ◽  
Robi Kurniawan ◽  
Shibghatullah Muhammady ◽  
Inge M. Sutjahja ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Magnetron Sputtering ◽  
Room Temperature ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron

Synthesis of (Ti, Zr)N hard coatings by unbalanced magnetron sputtering

2000 ◽  
Vol 130 (1) ◽  
pp. 64-68 ◽  
Author(s):  
Da-Yung Wang ◽  
Chi-Lung Chang ◽  
Cheng-Hsun Hsu ◽  
Hua-Ni Lin
Keyword(s):  
Magnetron Sputtering ◽  
Hard Coatings ◽  
Unbalanced Magnetron Sputtering ◽  
Unbalanced Magnetron
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