Optical Characterization of Chemically Vapor Deposited and Laser-Annealed Polysilicon

1981 ◽  
Vol 4 ◽  
Author(s):  
B. G. Bagley ◽  
D. E. Aspnes ◽  
G. K. Celler ◽  
A. C. Adams

ABSTRACTThe optical properties of polysilicon on insulating SiO2 were measured by spectroscopic ellipsometry over the energy range 3.0 to 6.0 eV. Spectra were obtained for films as-deposited and after irradiation with an Ar ion laser (focused to a 50μm spot diameter) at 6.0, 7.0 or 7.5 watts. We observed monotonic changes in both ε1 and ε2 with increasing incident power even though the power density was high enough to completely melt the silicon surface in all cases. The changes observed are caused by changes in microstructure; with increasing power the amorphous component decreases and the density increases. Approximate values of the microstructural components are estimated by comparing measured spectra to those synthesized from constituent spectra in the Bruggeman effective medium approximation.

2021 ◽  
Vol 717 (1) ◽  
pp. 92-97
Author(s):  
O. S. Kondratenko ◽  
S. V. Mamykin ◽  
T. S. Lunko ◽  
I. B. Mamontova ◽  
V. R. Romanyuk

2021 ◽  
Author(s):  
Dominik Göbel ◽  
Pascal Rusch ◽  
Daniel Duvinage ◽  
Tim Stauch ◽  
Nadja C. Bigall ◽  
...  

The synthesis and optical characterization of novel single-benzene ESIPT-based fluorophores is described in solid state and in solution. Special attention is given towards the influence of their unique substitution pattern on their optical properties. Depending on this pattern, aggregation induced emission or aggregation caused quenching (ACQ) is observed in the solid state.<br>


Author(s):  
Yujun Hou ◽  
Chun Jiang

Since the growth of single layer of Si has emerged, silicene became a potential candidate material to make up the disadvantage of graphene. In this paper, the complex surface conductivity is applied to characterize the properties of silicene and we investigate the optical characterization of silicene-dielectric interfaces from IR to far UV range. The silicene-Si and silicene-Ge interfaces along both parallel and perpendicular polarization directions of electromagnetic field with normal incidence are considered in this work. The optical properties of the silicene-dielectric systems proposed in this paper lay a foundation for the performance of complex silicene-based optoelectronic devices such as sensors, detectors, filters, UV absorbers and so on.


2005 ◽  
Vol 59 (1) ◽  
pp. 94-99 ◽  
Author(s):  
Kyriaki Polikreti ◽  
Andreas Othonos ◽  
Constantinos Christofides

2003 ◽  
Vol 94 (2) ◽  
pp. 879-888 ◽  
Author(s):  
P. D. Paulson ◽  
R. W. Birkmire ◽  
W. N. Shafarman

1984 ◽  
Vol 35 ◽  
Author(s):  
T. Lohner ◽  
G. Mezey ◽  
M. Fried ◽  
L. GhiţA ◽  
C. Ghiţa ◽  
...  

ABSTRACTOne of the applications of high dose ion implantation is to form surface alloys or compound layers. The detailed characterization of such composite structures is of great importance. This paper tries to answer the question: how can we outline, at least, a qualitative picture from the optical properties measured by ellipsometry of high dose Al and Sb implanted silicon. Attempts are done to separate the effect of implanted impurities from the dominant disorder contribution to the measured optical properties. As the ellipsometry does not provide information enough to decide the applicability of optical models therefore methods sensitive to the structure (channeling and TEM) were applied too.


2010 ◽  
Vol 356 (41-42) ◽  
pp. 2192-2197 ◽  
Author(s):  
F. Atay ◽  
V. Bilgin ◽  
I. Akyuz ◽  
E. Ketenci ◽  
S. Kose

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