Effect of Electric ARC Plasma Jet Treatment on Mos Structure Reliability
Keyword(s):
AbstractThe effect of electric arc plasma jet treatment (APJT) on MOS structure reliability has been investigated. Si/SiO2/Si*/Al structures have been studied using the technique of constant current charge to breakdown before and after APJT. The study showed that APJT can improve MOS structure reliability: constant current charge to breakdown Qbd increased to more than 5 C·cm-2 and breakdown field Ebd increased to more than 20 MV/cm. This result was attributed to a structural modification of SiO2 and its interfaces as a result of APJT. Evidence for these structural changes is the appearance of additional SiO2 IR absorption peak which was observed by us.
Keyword(s):
High Temperature Material Processes An International Quarterly of High-Technology Plasma Processes
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1997 ◽
Vol 1
(2)
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pp. 167-178
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Keyword(s):
Dc Arc
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2019 ◽
Vol 85
(2)
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pp. 17-22
1997 ◽
Vol 70
(4)
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pp. 605-608