IR and MW Absorption Techniques for Bulk and Surface Recombination Control in High-Quaiity Silicon
Keyword(s):
ABSTRACTThe carrier recombination rate in high-quality FZ and Cz silicon substrates is studied by contactless infrared and microwave absorption techniques. Different surface treatments covering a wide range of surface recombination velocity have been used for the separation of bulk and surface recombination components and evaluating of the efficiency of passivation. Limitations of effective lifetime approach are analyzed specific for low and high injection level. Sensitivity limits of the techniques for iron contamination are discussed
1994 ◽
Vol 34
(1-4)
◽
pp. 169-175
◽
2006 ◽
Vol 527-529
◽
pp. 1441-1444
2012 ◽
Vol 2012
◽
pp. 1-5
◽
2003 ◽
Vol 77
(3)
◽
pp. 293-301
◽
Keyword(s):