Strained Layer Epitaxy on Rough Si Surfaces

1995 ◽  
Vol 379 ◽  
Author(s):  
T.D. Lowes ◽  
M. Zinke-Allmang
Keyword(s):  
Epitaxial Layer ◽  
Critical Thickness ◽  
Lattice Mismatch ◽  
Rough Surfaces ◽  
Misfit Strain ◽  
Surface Roughening ◽  
Epitaxial Layers ◽  
Dislocation Generation ◽  
Surface Features ◽  
Initial Substrate

ABSTRACTLattice mismatch associated with heteroepitaxy imposes a significant limitation on the epitaxial compatibility between overlayer and substrate. In lattice mismatched systems the misfit may be accommodated to some extent by strain. However, in order to maintain misfit strain and avoid dislocation generation the epitaxial layer must not exceed a critical thickness. Some success has been reported in avoiding damaged epitaxial layers with thicknesses greater than the critical thickness by overgrowing on patterned or rough surfaces. For the case of Si, surface roughening by energetic Ar+ bombardment as a pre-growth roughening treatment is discussed and assessed. Evolution of surface features as a function of initial substrate treatment, ion accelerating potential, and the duration of bombardment are presented. Stability of the surface features generated by bombardment for typical overgrowth conditions was tested to assess feasibility of this technique for Si heteroepitaxy.

scholarly journals Исследование однородности состава по толщине слоев GaInAsP, полученных на подложках InP методом газофазной эпитаксии

2019 ◽  
Vol 53 (11) ◽  
pp. 1512
Author(s):  
Г.С. Гагис ◽  
Р.В. Левин ◽  
А.Е. Маричев ◽  
Б.В. Пушный ◽  
М.П. Щеглов ◽  
...  
Keyword(s):  
Epitaxial Layer ◽  
Lattice Mismatch ◽  
Crystal Surface ◽  
Chemical Vapor ◽  
Organic Chemical ◽  
Epitaxial Layers ◽  
Crystal Perfection ◽  
Vapor Phase Deposition ◽  
Low Degree ◽  
Metal Organic

GaInPAs/InP heterostructures grown by low pressure (0.1 bar, 600 oC) metal-organic chemical vapor phase deposition were investigated. The thicknesses of grown GaInAsP layers were about 1 µm. For the epitaxial layers Ga<sub>1-x</sub>In<sub>x</sub>P<sub>1-y</sub>As<sub>y)</sub> with average compositions of x = 0.77 – 0.87 and y = 0.07 – 0.42 the variation of V group elements content y with the epilayer depth were revealed, weher the compositions of V-group elements were changed up to Δy = 0.1 atomic fractions in V group elements sublattice. In most cases, y change occurs in a GaInAsP region up to 200 nm thick adjacent to the InP. In some cases, y changes throughout the whole GaInPAs layer thickness. Fo the epitaxial layers with a satisfactory crystal perfection the less was the mismatch between the substrate and the GaInPAs epitaxial layer, the smaller was the value of Δy. For GaInPAs layers characterized by a low degree of crystal perfection and a high lattice mismatch between GaInAsP and InP layers, the value of Δy was about zero. These data let us suggest that the incorporation of atoms of the V group in the epitaxial layer strongly depends on elastic deformation of the growing monolayer, that is mismatched with the underlying crystal surface.

A phase field crystal model simulation of morphology evolution and misfit dislocation generation in nanoheteroepitaxy

2017 ◽  
Vol 31 (30) ◽  
pp. 1750283 ◽  
Author(s):  
J. Zhang ◽  
Z. Chen ◽  
C. Cheng ◽  
Y. X. Wang
Keyword(s):  
Misfit Dislocation ◽  
Phase Field ◽  
Lattice Mismatch ◽  
Model Simulation ◽  
Rough Surfaces ◽  
Morphology Evolution ◽  
Misfit Dislocations ◽  
Dislocation Generation ◽  
Strain Relief ◽  
Phase Field Crystal

A phase field crystal (PFC) model is employed to study morphology evolution of nanoheteroepitaxy and misfit dislocation generation when applied with enhanced supercooling, lattice mismatch and substrate vicinal angle conditions. Misfit strain that rises due to lattice mismatch causes rough surfaces or misfit dislocations, deteriorates film properties, hence, efforts taken to reveal their microscopic mechanism are significant for film quality improvement. Uniform islands, instead of misfit dislocations, are developed in subcritical thickness film, serving as a way of strain relief by surface mechanism. Misfit dislocations generate when strain relief by surface mechanism is deficient in higher supercooling, multilayers of misfit dislocations dominate, but the number of layers reduces gradually when the supercooling is further enhanced. Rough surfaces like islands or cuspate pits are developed which is ascribed to lattice mismatch, multilayers of misfit dislocations generate to further enhance lattice mismatch. Layers of misfit dislocations generate at a thickening position at enhanced substrate vicinal angle, this further enhancing the angle leading to sporadic generation of misfit dislocations.

Structural Characterization Of Sic Epitaxial Layers Grown On Porous Sic Substrates

2000 ◽  
Vol 640 ◽  
Author(s):  
S. E. Saddow ◽  
G. Melnychuk ◽  
M. Mynbaeva ◽  
I. Nikitina ◽  
W. M. Vetter ◽  
...  
Keyword(s):  
Dislocation Density ◽  
Epitaxial Layer ◽  
Preliminary Investigation ◽  
Analytical Techniques ◽  
Epitaxial Layers ◽  
Cross Sectional ◽  
Initial Substrate ◽  
Order Of Magnitude ◽  
Porous Sic

ABSTRACTA layer of porous SiC was fabricated by surface anodization of commercial 4H and 6H-SiC (0001)Si face off-axis wafers. A 8.5 μm 4H–SiC epilayer was grown on porous SiC (PSC) substrates using atmospheric pressure CVD. TEM investigation on cross-sectional specimens of the CVD epitaxial layers revealed that the presence of pores in the substrate does not lead to the formation of any micropipe in the epitaxial layer. The investigation also failed to detect a more than usual dislocation density on the basal plane of the epitaxial layer. Based upon the results of various analytical techniques applied to the CVD deposit we propose that the density of screw dislocations in the epitaxial layer is less than 5–104 cm−3. It should be noted that the density of similar types of dislocations in the initial substrate as determined by the TEM was ∼106 cm−3, so this preliminary investigation indicates that the epitaxial layer grown on PSC may have a reduction in dislocation density of more than an order of magnitude over those grown on conventional SiC substrates that are not porous. Synchrotron white beam x-ray topography (SWBXT) was performed on these layers. Comparison between the dislocation density on the porous and standard epitaxial layers proved to be very similar using this technique.

Structural properties of GaAs/InGaAs/GaAs (001) and InGaAs/GaAs (001) heterostructures and correlation with electronic properties

1990 ◽  
Vol 48 (4) ◽  
pp. 602-603
Author(s):  
J.M. Bonar ◽  
R. Hull ◽  
R. Malik ◽  
R. Ryan ◽  
J.F. Walker
Keyword(s):  
Band Gap ◽  
Electronic Properties ◽  
Gaas Substrate ◽  
Critical Thickness ◽  
Lattice Mismatch ◽  
Band Offset ◽  
Misfit Dislocations ◽  
Gaas Substrates ◽  
Gaas Structure ◽  
Low X

In this study we have examined a series of strained heteropeitaxial GaAs/InGaAs/GaAs and InGaAs/GaAs structures, both on (001) GaAs substrates. These heterostructures are potentially very interesting from a device standpoint because of improved band gap properties (InAs has a much smaller band gap than GaAs so there is a large band offset at the InGaAs/GaAs interface), and because of the much higher mobility of InAs. However, there is a 7.2% lattice mismatch between InAs and GaAs, so an InxGa1-xAs layer in a GaAs structure with even relatively low x will have a large amount of strain, and misfit dislocations are expected to form above some critical thickness. We attempt here to correlate the effect of misfit dislocations on the electronic properties of this material.The samples we examined consisted of 200Å InxGa1-xAs layered in a hetero-junction bipolar transistor (HBT) structure (InxGa1-xAs on top of a (001) GaAs buffer, followed by more GaAs, then a layer of AlGaAs and a GaAs cap), and a series consisting of a 200Å layer of InxGa1-xAs on a (001) GaAs substrate.

Epitaxial Growth in Dislocation-Free Strained Alloy Films

2002 ◽  
Vol 715 ◽  
Author(s):  
Zhi-Feng Huang ◽  
Rashmi C. Desai
Keyword(s):  
Deposition Rate ◽  
Elastic Moduli ◽  
Composition Dependence ◽  
Critical Thickness ◽  
Lattice Misfit ◽  
Misfit Strain ◽  
Joint Stability ◽  
Alloy Films ◽  
The Stability ◽  
Stability Results

AbstractThe morphological and compositional instabilities in the heteroepitaxial strained alloy films have attracted intense interest from both experimentalists and theorists. To understand the mechanisms and properties for the generation of instabilities, we have developed a nonequilibrium, continuum model for the dislocation-free and coherent film systems. The early evolution processes of surface pro.les for both growing and postdeposition (non-growing) thin alloy films are studied through a linear stability analysis. We consider the coupling between top surface of the film and the underlying bulk, as well as the combination and interplay of different elastic effects. These e.ects are caused by filmsubstrate lattice misfit, composition dependence of film lattice constant (compositional stress), and composition dependence of both Young's and shear elastic moduli. The interplay of these factors as well as the growth temperature and deposition rate leads to rich and complicated stability results. For both the growing.lm and non-growing alloy free surface, we determine the stability conditions and diagrams for the system. These show the joint stability or instability for film morphology and compositional pro.les, as well as the asymmetry between tensile and compressive layers. The kinetic critical thickness for the onset of instability during.lm growth is also calculated, and its scaling behavior with respect to misfit strain and deposition rate determined. Our results have implications for real alloy growth systems such as SiGe and InGaAs, which agree with qualitative trends seen in recent experimental observations.

SiC Epitaxial Layers Grown by Sublimation Method and their Electrical Properties

2007 ◽  
Vol 556-557 ◽  
pp. 153-156
Author(s):  
Chi Kwon Park ◽  
Gi Sub Lee ◽  
Ju Young Lee ◽  
Myung Ok Kyun ◽  
Won Jae Lee ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Epitaxial Layer ◽  
Light Emission ◽  
Epitaxial Layers ◽  
Current Voltage ◽  
Space Technique ◽  
Sublimation Method ◽  
Device Applications ◽  
P Type ◽  
Surface Morphologies

A sublimation epitaxial method, referred to as the Closed Space Technique (CST) was adopted to produce thick SiC epitaxial layers for power device applications. In this study, we aimed to systematically investigate surface morphologies and electrical properties of SiC epitaxial layers grown with varying a SiC/Al ratio in a SiC source powder during the sublimation growth using the CST method. It was confirmed that the acceptor concentration of epitaxial layer was continuously decreased with increasing the SiC/Al ratio. The blue light emission was successfully observed on a PN diode structure fabricated with the p-type SiC epitaxial layer. Furthermore, 4H-SiC MESFETs having a micron-gate length were fabricated using a lithography process and their current-voltage performances were characterized.

Point Contact Current Voltage Measurements of 4H-SiC Samples with Different Doping Profiles

2017 ◽  
Vol 897 ◽  
pp. 287-290 ◽  
Author(s):  
Matthias Kocher ◽  
Michael Niebauer ◽  
Mathias Rommel ◽  
Volker Haeublein ◽  
Anton J. Bauer
Keyword(s):  
Epitaxial Layer ◽  
Depth Profile ◽  
Point Contact ◽  
Surface Preparation ◽  
Epitaxial Layers ◽  
Depth Profiles ◽  
Current Voltage ◽  
Measured Resistance ◽  
Doping Profiles ◽  
Good Agreement

Point contact current voltage (PCIV) measurements were performed on 4H-SiC samples, both for n- an p-doped epitaxial layers as well as samples with rather shallow doping profiles realized by N- or Al-implantation in a range from 1016 cm-3 to 1019 cm-3. Surface preparation and measurement parameters were investigated in order to determine their influence on the measured resistance profiles. Furthermore depth profile measurements were performed on both an epitaxial layer as well as on implanted samples. These depth profiles could be measured reproducibly and showed good agreement with expected profiles for Al-implanted samples as well as for epitaxial layer whereas for N-implanted samples deviations between measured and expected profiles could be observed. It could be proven that PCIV profiling technique is a promising method for characterizing doped profiles in 4H-SiC, especially on Al-implanted samples.

A Tem study of GaN Grown by ELO on (0001) 6H-SiC

1999 ◽  
Vol 595 ◽  
Author(s):  
P. Ruterana ◽  
B. Beaumont ◽  
P. Gibart ◽  
Y. Melnik
Keyword(s):  
Basal Plane ◽  
Lattice Mismatch ◽  
Early Stage ◽  
Vapour Phase ◽  
Epitaxial Layers ◽  
Prismatic Plane ◽  
Vapour Phase Epitaxy ◽  
Hexagonal Shape ◽  
To Come

AbstractThe misfit between GaN and 6H-SiC is 3.5% instead of 16% with sapphire, the epitaxial layers have similar densities of defects on both substrates. Moreover, the lattice mismatch between AlN and 6H-SiC is only 1%. Therefore, epitaxial layer overgrowth (ELO) of GaN on AlN/6H-SiC could be a route to further improve the quality of epitaxial layers. AlN has been grown by Halide Vapour Phase Epitaxy (HVPE) on (0001) 6H-SiC, thereafter a dielectric SiO2 mask was deposited and circular openings were made by standard photolithography and reactive ion etching. We have examined GaN layers at an early stage of coalescence in order to identify which dislocations bend and try to understand why. The analysed islands have always the same hexagonal shape, limited by {0110} facets. The a type dislocations are found to fold many times from basal to the prismatic plane, whereas when a+c dislocations bend to the basal plane, they were not seen to come back to a prismatic one.

TEM Study of strain states in III-V semiconductor epitaxial layers.

2001 ◽  
Vol 673 ◽  
Author(s):  
André ROCHER ◽  
Anne PONCHET ◽  
Stéphanie BLANC ◽  
Chantal FONTAINE
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Lattice Mismatch ◽  
Thick Layer ◽  
Misfit Strain ◽  
Gasb Layer ◽  
Transmission Electron ◽  
Moiré Fringes ◽  
Square Array ◽  
Plane View

ABSTRACTThe strain states induced by a lattice mismatch in epitaxial systems have been studied by Transmission Electron Microscopy (TEM) using the moiré fringe technique on plane view samples. For the GaSb/(001)GaAs system, moiré patterns suggest that the GaSb layer is free of stress and homogeneously relaxed by a perfect square array of Lomer dislocations. A 10 nm thick layer of GaInAs (20% In concentration) grown on (001)GaAs does not give any moiré fringes for all low-index Bragg reflections: this result indicates that the effective misfit strain does not correspond to the theoretical one described by the elastic theory. Segregation effects are expected to play an important role in the relaxation of the misfit strain.

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