Elastic Properties and Stresses in Polyimide thin Films and Coatings

1994 ◽  
Vol 356 ◽  
Author(s):  
Kapil C. Sheth ◽  
Michael Chen ◽  
Richard J. Farris
Keyword(s):  
Thin Films ◽  
Residual Stresses ◽  
Real Time ◽  
Elastic Properties ◽  
Elastic Constants ◽  
Holographic Interferometry ◽  
Moisture Diffusion ◽  
Complex Geometries ◽  
Diffusion Constants

AbstractPolyimide thin films and coatings (< 20μm) for electronic applications have been fully characterized. Analysis of residual stresses and determination of all 21 anisotropic constants are necessary for a better understanding of these coatings in complex geometries. The residual stresses have been measured by a real-time vibrational holographic interferometry technique. The number of elastic constants is reduced to 9 independent constants by finding the orthotopic axes. All the 9 orthotropic constants - 3 normal compliances, 3 shear compliances and 3 independent Poisson’s ratios - have been determined. Moisture diffusion constants have also been measured.

The Determination of Mechanical Parameters and Residual Stresses for Thin Films Using Micro-Cantilever Beams

1988 ◽  
Vol 130 ◽  
Author(s):  
S. Hong ◽  
T. P. Weihs ◽  
J. C. Bravman ◽  
W. D. Nix
Keyword(s):  
Thin Films ◽  
Residual Stresses ◽  
Elastic Constants ◽  
Testing Machine ◽  
Elastic Response ◽  
Cantilever Beams ◽  
Mechanical Parameters ◽  
Processing Technologies ◽  
Micro Cantilever

AbstractA method for determining mechanical parameters and residual stresses for thin films is described. Multi-layer cantilever beams (LPCVD SiNx/thermal SiO2) are fabricated utilizing standard IC processing technologies and micromachining of silicon. The elastic response of the beams to imposed deflections is then measured using a Nanoindenter, a sub-micron hardness testing machine. The elastic constants of the nitride films are calculated from the force vs. deflection slope and known elastic constants of the thermal SiO2 and silicon. By measuring the curvature of the multi-layer cantilever beams with a scanning electron microscope after successive etching of the LPCVD nitride films, average and differential stresses in the films were calculated.

Determination of the elastic properties of carbon thin films using scanning acoustic microscopy

1998 ◽  
Author(s):  
A. Pageler ◽  
Klaus Kosbi ◽  
Ulf G. Brauneck ◽  
Hans Gerd G. Busmann ◽  
Siegfried Boseck
Keyword(s):  
Thin Films ◽  
Elastic Properties ◽  
Acoustic Microscopy ◽  
Scanning Acoustic Microscopy ◽  
Carbon Thin Films

On: “RECENT TECHNIQUES FOR DETERMINATION OF IN SITU ELASTIC PROPERTIES AND MEASUREMENT OF MOTION AMPLIFICATION IN LAYERED MEDIA,” BY R.J. SWAIN (GEOPHYSICS, APRIL, 1962, PP. 237–241).

Geophysics ◽  
1963 ◽  
Vol 28 (1) ◽  
pp. 112-112 ◽  
Author(s):  
Harry R. Nicholls
Keyword(s):  
Elastic Properties ◽  
Elastic Constants ◽  
Design Problem ◽  
Critical Angle ◽  
Specific Design ◽  
Design Problems ◽  
Relative Value ◽  
Angle Method

Although I am in general agreement with Mr. Swain’s paper, there are several pitfalls inherent in the use of dynamic elastic constants which should not be ignored. The strength of materials and the elastic properties both undoubtedly depend on the rate of loading and/or the stress levels involved. It does not seem appropriate, therefore, to use dynamic in situ elastic properties for static design problems. The specific design problem at hand should determine the relative value placed on the use of static or dynamic elastic constants. The dynamic in situ values are generally more reliable than those obtained in the laboratory as indicated by Mr. Swain, although continued development of the laboratory pulse and critical‐angle method shows promise of improving the reliability of laboratory values.

scholarly journals Determination of the elastic moduli and residual stresses of freestanding Au-TiW bilayer thin films by nanoindentation

2016 ◽  
Vol 106 ◽  
pp. 436-445 ◽  
Author(s):  
Matteo Ghidelli ◽  
Marco Sebastiani ◽  
Christian Collet ◽  
Raphael Guillemet
Keyword(s):  
Thin Films ◽  
Residual Stresses ◽  
Elastic Moduli

RECENT TECHNIQUES FOR DETERMINATION OF “IN‐SITU” ELASTIC PROPERTIES AND MEASUREMENT OF MOTION AMPLIFICATION IN LAYERED MEDIA

Geophysics ◽  
1962 ◽  
Vol 27 (2) ◽  
pp. 237-241 ◽  
Author(s):  
R. J. Swain
Keyword(s):  
Engineering Design ◽  
Elastic Properties ◽  
Elastic Constants ◽  
Layered Media ◽  
Dynamic Loads ◽  
Safety Factors

Determination of the elastic properties of earth materials by laboratory means is subject to sizable errors. These errors may be serious in spite of the large safety factors normally used in engineering design, particularly if the structure must withstand severe dynamic loads. Means of obtaining elastic constants “in‐situ” are described. Further, the phenomenon of displacement multiplication between the underlying competent rock and overlying alluvium or fill is reviewed and the first instrumentation system designed specifically to measure this relationship for engineering purposes is described.

Non-Contact Real-Time Evaluation of Polyimide Thin Film Thermoelastic Properties Through Impulsive Stimulated Thermal Scattering

1992 ◽  
Vol 284 ◽  
Author(s):  
J. A. Rogers ◽  
A. R. Duggal ◽  
K. A. Nelson
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Real Time ◽  
Viscoelastic Properties ◽  
Thermoelastic Properties ◽  
Substrate Adhesion ◽  
Thermal Scattering ◽  
Film Substrate ◽  
Time Evaluation

ABSTRACTWe demonstrate a new purely optical based method for the excitation and detection of acoustic and thermal disturbances in thin films. This technique is applied to the determination of the viscoelastic properties of unsupported and silicon supported polyimide thin (∼1 micron) films. We show how this technique can be used to detect film delaminations and suggest how it may be used to probe film-substrate adhesion quality.

scholarly journals Determination of the high temperature elastic properties and diffraction elastic constants of Ni-base superalloys

2016 ◽  
Vol 89 ◽  
pp. 856-863 ◽  
Author(s):  
P.E. Aba-Perea ◽  
T. Pirling ◽  
P.J. Withers ◽  
J. Kelleher ◽  
S. Kabra ◽  
...  
Keyword(s):  
High Temperature ◽  
Elastic Properties ◽  
Elastic Constants
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