Study of Titanium Nitrides Synthesized by High Dose Ion Implantation

1994 ◽  
Vol 354 ◽  
Author(s):  
M. Guemmaz ◽  
A. Mosser ◽  
D. Raiser ◽  
J.J. Grob ◽  
A. Cornet ◽  
...  
Keyword(s):  
Solid Solution ◽  
Ion Implantation ◽  
Grazing Incidence ◽  
High Dose ◽  
Titanium Nitrides ◽  
Nitrogen Distribution ◽  
X Ray ◽  
High Fluences ◽  
Grazing Incidence Diffraction ◽  
Nitride Layers

AbstractPolycrystalline titanium samples were implanted with N+ ions at high fluences and at several energies. The aim was to obtain 4000 Â thick nitrided layers of constant nominal concentration equal to 20% ,30%, and 40%.The results obtained by RBS showed a flat nitrogen distribution with depth and the measured concentrations were respectively 20%,31% and 38%.X-ray grazing incidence diffraction indicated that, at 20%, a nitrogen solid solution is formed in the a-Ti matrix. At 31% the nitrogen solid solution is present besides a 5-TiN phase and at 38% only the 5-TiN phase remains.From nanoindentation measurements, we derived the depth-related hardness and Young's modulus of the implanted samples. These values were compared to those found on titanium nitride layers obtained with other coating techniques.

Erratum: X‐ray grazing incidence diffraction from alkylsiloxane monolayers on silicon wafers [J. Chem. Phys. 95, 2854 (1991)]

1993 ◽  
Vol 98 (2) ◽  
pp. 1754-1754
Author(s):  
I. M. Tidswell ◽  
T. A. Rabedeau ◽  
P. S. Pershan ◽  
S. D. Kosowsky ◽  
J. P. Folkers ◽  
...  
Keyword(s):  
Grazing Incidence ◽  
Chem Phys ◽  
Silicon Wafers ◽  
X Ray ◽  
Grazing Incidence Diffraction

Vertical alignment of multilayered quantum dots studied by x-ray grazing-incidence diffraction

1999 ◽  
Vol 60 (4) ◽  
pp. 2516-2521 ◽  
Author(s):  
I. Kegel ◽  
T. H. Metzger ◽  
J. Peisl ◽  
J. Stangl ◽  
G. Bauer ◽  
...  
Keyword(s):  
Quantum Dots ◽  
Grazing Incidence ◽  
Vertical Alignment ◽  
X Ray ◽  
Grazing Incidence Diffraction

X-Ray Diffuse Scattering Investigation of Defects in Ion Implanted and Annealed Silicon

1998 ◽  
Vol 524 ◽  
Author(s):  
C. H. Chang ◽  
U. Beck ◽  
T. H. Metzger ◽  
J. R. Patel
Keyword(s):  
Ion Implantation ◽  
Point Defect ◽  
Point Defects ◽  
Diffuse Scattering ◽  
Grazing Incidence ◽  
X Rays ◽  
Scattered Intensity ◽  
X Ray ◽  
Defect Clusters ◽  
Point Defect Clusters

ABSTRACTTo characterize the point defects and point defect clusters introduced by ion implantation and annealing, we have used grazing incidence x-rays to measure the diffuse scattering in the tails of Bragg peaks (Huang Scattering). An analysis of the diffuse scattered intensity will allow us to characterize the nature of point defects or defect clusters introduced by ion implantation. We have also observed unexpected satellite peaks in the diffuse scattered tails. Possible causes for the occurrence of the peaks will be discussed.

Structural Analysis of Silicon Doped by Plasma Source Ion Implantation

1993 ◽  
Vol 316 ◽  
Author(s):  
R.J. Matyi ◽  
D.L. Chapek ◽  
J.R. Conrad ◽  
S.B. Felch
Keyword(s):  
Ion Implantation ◽  
Diffuse Scattering ◽  
Structural Changes ◽  
Plasma Source ◽  
Perfect Crystal ◽  
Crystal Defects ◽  
High Dose ◽  
X Ray ◽  
Doped Silicon ◽  
Plasma Source Ion Implantation

ABSTRACTWe have used high resolution x-ray diffraction to analyze the structural changes that accompany boron doping of silicon by BF3 plasma source ion implantation (PSII). Triple crystal diffraction analysis of as-implanted PSII doped silicon showed little excess x-ray diffuse scattering, even when analyzed using the asymmetric (113) reflection for increased surface sensitivity. This result suggests that PSΠ is capable of providing high dose implantation with low damage. Annealing of the PSII-doped silicon showed the development of a compressive surface layer, indicated by enhanced x-ray scattering directed perpendicular to the surface. Virtually all of the scattering from the annealed samples was concentrated in the so-called “surface streak” which arises due to dynamical diffraction from the perfect crystal Si structure. Little if any diffuse scattering due to kinematic scattering from crystal defects was detected. These observations indicate that plasma source doping can be used to achieve both a shallow implant depth and an extremely uniform incorporation of boron into the silicon lattice.

scholarly journals Microstructure and Mechanical Properties of Ti + N Ion Implanted Cronidur30 Steel

Materials ◽  
2019 ◽  
Vol 12 (3) ◽  
pp. 427 ◽  
Author(s):  
Jie Jin ◽  
Wei Wang ◽  
Xinchun Chen
Keyword(s):  
Mechanical Properties ◽  
Ion Implantation ◽  
Photoelectron Spectroscopy ◽  
Structural Modification ◽  
Surface Region ◽  
Grazing Incidence ◽  
Bearing Steel ◽  
Near Surface ◽  
X Ray ◽  
Ion Implanted

In this study, Ti + N ion implantation was used as a surface modification method for surface hardening and friction-reducing properties of Cronidur30 bearing steel. The structural modification and newly-formed ceramic phases induced by the ion implantation processes were investigated by transmission electron microscopy (TEM), X-ray photoelectron spectroscopy (XPS), and grazing incidence X-ray diffraction (GIXRD). The mechanical properties of the samples were tested by nanoindentation and friction experiments. The surface nanohardness was also improved significantly, changing from ~10.5 GPa (pristine substrate) to ~14.2 GPa (Ti + N implanted sample). The friction coefficient of Ti + N ion implanted samples was greatly reduced before failure, which is less than one third of pristine samples. Furthermore, the TEM analyses confirmed a trilamellar structure at the near-surface region, in which amorphous/ceramic nanocrystalline phases were embedded into the implanted layers. The combined structural modification and hardening ceramic phases played a crucial role in improving surface properties, and the variations in these two factors determined the differences in the mechanical properties of the samples.

Grazing incidence diffraction of cadmium arachidate multilayers at the solid-liquid interface

2005 ◽  
Vol 220 (12) ◽  
Author(s):  
Chad E. Miller ◽  
Jaroslaw Majewski ◽  
Thomas Gog ◽  
Tonya L. Kuhl
Keyword(s):  
Arachidic Acid ◽  
Grazing Incidence ◽  
X Ray Diffraction ◽  
X Ray ◽  
Organic Layers ◽  
Grazing Incidence Diffraction ◽  
Synchrotron Beam ◽  
Solid Liquid Interface ◽  
Solid Liquid ◽  
Monochromatic Synchrotron

AbstractUsing complementary X-ray reflectivity (XR) and grazing incidence X-ray diffraction (GIXD), we report structural studies of supported thin-organic layers in contact with water and air. Using a monochromatic synchrotron beam to penetrate 10 mm of liquid, we have characterized buried films composed of 12.5 repeating bilayers of arachidic acid (C

Waveguide-enhanced scattering from thin biomolecular films

2002 ◽  
Vol 35 (2) ◽  
pp. 163-167 ◽  
Author(s):  
F. Pfeiffer ◽  
U. Mennicke ◽  
T. Salditt
Keyword(s):  
Lipid Bilayers ◽  
Signal To Noise Ratio ◽  
Acyl Chain ◽  
Grazing Incidence ◽  
Waveguide Structure ◽  
X Ray Diffraction ◽  
Signal To Noise ◽  
X Ray ◽  
Grazing Incidence Diffraction ◽  
Chain Ordering

An X-ray diffraction experiment on multilamellar membranes incorporated into an X-ray waveguide structure is reported. In the device, the lipid bilayers are confined to one side by the silicon substrate and to the other side by an evaporated thin metal cap layer. Shining a highly brilliant X-ray beam onto the system, resonantly enhanced, precisely defined and clearly distinguishable standing-wavefield distributions (modes) are excited. The in-plane structure of the acyl chain ordering is then studied by grazing incidence diffraction under simultaneously excited modes. A significant gain in signal-to-noise ratio as well as enhanced spatial resolution can be obtained with such a setup.

Sign in / Sign up

Export Citation Format

Share Document