Measurement of Thermally-Induced Strains in Polycrystalline Al Thin Films on Si Using Convergent Beam Electron Diffraction

1994 ◽  
Vol 343 ◽  
Author(s):  
S. K. Streiffer ◽  
S. Bader ◽  
C. Deininger ◽  
J. Mayer ◽  
M. Rühle
Keyword(s):  
Electron Diffraction ◽  
Ccd Camera ◽  
Lattice Parameter ◽  
Convergent Beam Electron Diffraction ◽  
Thermally Induced ◽  
Beam Electron ◽  
Texture Model ◽  
Refinement Procedure ◽  
Convergent Beam ◽  
Line Positions

ABSTRACTStrains in polycrystalline Al films grown on oxidized Si wafers were measured using convergent beam electron diffraction (CBED). CBED patterns were acquired on a Zeiss EM 912 TEM equipped with an imaging energy filter and CCD camera. HOLZ line positions in the (000) CBED disk were matched using an automated refinement procedure. A sensitivity to variations in lattice parameter of approximately 0.00007 nm was obtained. Strong deviations from a simple equibiaxial strain, perfect [111] texture model were observed.

Relative Lattice Parameter Measurement in Quaternary (InGaAsP) Layers on InP Substrates Using Convergent Beam Electron Diffraction

1986 ◽  
Vol 69 ◽  
Author(s):  
M. E. Twigg ◽  
S. N. G. Chu ◽  
D. C. Joy ◽  
D. M. Maher ◽  
A. T. Macrander ◽  
...  
Keyword(s):  
Electron Diffraction ◽  
Lattice Parameter ◽  
Convergent Beam Electron Diffraction ◽  
X Ray Diffraction ◽  
Device Structure ◽  
Beam Electron ◽  
X Ray ◽  
Convergent Beam ◽  
Relative Change ◽  
Inp Substrates

AbstractWith X-ray diffraction techniques, it is possible to routinely measure lattice parameters to several parts in 104 for macroscopic specimens. However, measurements of lattice parameter changes for quaternary (InGaAsP) device structures several microns in width are not usually feasible with X-ray diffraction techniques. Convergent Beam Electron Diffraction (CBED), which is one of the techniques available on a modern transmission electron microscope (TEM), may be sensitive to these small, localized lattice parameter changes. Unfortunately, dynamical diffraction effects prevent direct extraction of changes in the lattice parameter from CBED patterns which are obtained from high atomic number materials. For this reason, we have chosen to calibrate the relative position of CBED features with X-ray lattice parameter measurements which were obtained from planar quaternary layers grown on InP substrates. For the active quaternary region of an electro-optical device structure, it is shown that this approach may be sensitive to a relative change in the lattice parameter as small as ±2 parts in 104, which is the uncertainty in the X-ray calibration measurements.

Microstructure Study of BaTiO3 Ceramics Using Convergent Beam Electron Diffraction

2008 ◽  
Vol 388 ◽  
pp. 273-276 ◽  
Author(s):  
Keisuke Kobayashi ◽  
Toshimasa Suzuki ◽  
Youichi Mizuno
Keyword(s):  
Electron Diffraction ◽  
Lattice Parameter ◽  
Convergent Beam Electron Diffraction ◽  
Core Shell ◽  
Beam Electron ◽  
The Core ◽  
Direct Measurements ◽  
Convergent Beam ◽  
Grain Core ◽  
Perovskite Unit Cell

The nanoscale local structure of core-shell structured BaTiO3 grains with a nonuniform dopant distribution was studied by convergent beam electron diffraction. The direct measurements of the variation of lattice parameter in an individual BaTiO3 grain were achieved. It was found that the lattice parameter continuously increased from inside the grain core to the grain shell and there was no discontinuity at the core/shell interface. The increasing gradient of c-axes was slightly smaller than that of a-axes, suggesting that the perovskite unit cell in the grain shell has lower tetragonality.

Lattice parameter measurement by convergent-beam electron diffraction

1994 ◽  
Vol 52 ◽  
pp. 952-953
Author(s):  
J. M. Howe
Keyword(s):  
Electron Microscopy ◽  
Electron Diffraction ◽  
Lattice Parameter ◽  
Convergent Beam Electron Diffraction ◽  
Lattice Parameters ◽  
Parameter Measurement ◽  
Parameter Determination ◽  
Beam Electron ◽  
Lattice Parameter Measurement ◽  
Convergent Beam

Convergent-beam electron diffraction (CBED) should be an ideal technique for determining the lattice parameters of regions as small as a nanometer in size. This capability was first demonstrated about fifteen years ago and CBED has been used in a number of analyses since this time. In general though, the technique has been slow to catch on, except in the semiconductor area, where CBED has been usedextensively to measure lattice parameters in Si/SixGe1-x superlattices. Possible reasons for the slow adoption of this technique by the electron microscopy and materials science communities may be that: 1) CBED is usually dynamical, and it has become apparent that the use of simple kinematical calculations can lead to substantial errors (or at least some uncertainty) in quantitative lattice parameter determination, 2) a standardized procedure for determining the lattice parameters in the most general case, when six parameters are unknown, has not been established, and 3) surface relaxation associated with the thin foils used in transmission electron microscopy (TEM) may distort the sample and cause it to be unlike bulk material. The purpose of this paper is to assess the present status of lattice parameter measurement by CBED, particularly with respect to the three areas just mentioned.

Measurement of Local Strain in Thin Aluminium Interconnects Using Convergent Beam Electron Diffraction (CBED)

1999 ◽  
Vol 594 ◽  
Author(s):  
S. Krämer ◽  
J. Mayer
Keyword(s):  
Electron Diffraction ◽  
Axial Strain ◽  
Local Strain ◽  
Convergent Beam Electron Diffraction ◽  
Elastic Behaviour ◽  
Large Strains ◽  
Beam Electron ◽  
Single Grain ◽  
Convergent Beam ◽  
Line Positions

AbstractEnergy filtered convergent beam electron diffraction (CBED) was used to investigate localized strain in aluminium interconnects. An analysis of the higher order Laue zone (HOLZ) line positions in CBED patterns makes it possible to measure the lattice strain with high accuracy (∼10−4) and high spatial resolution (10 to 100 nm). The strain development in a single grain was measured during thermal cycling between −170°C and + 100°C. The grain showed reversible, elastic behaviour over the whole temperature range building up large strains at low temperatures. By comparing with finite element simulations, a detailed understanding of the tri-axial strain state could be achieved.

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