X-Ray Diffraction Determination of the Effect of Passivations on Stress in Patterned Lines of Tungsten

1994 ◽  
Vol 338 ◽  
Author(s):  
L. Maniguet ◽  
M. Ignat ◽  
M. Dupeux ◽  
J.J. Bacmann ◽  
Ph. Normandon
Keyword(s):  
Tensile Stress ◽  
Line Width ◽  
Intrinsic Stress ◽  
X Ray Diffraction ◽  
Metal Line ◽  
X Ray ◽  
The Third ◽  
Diffraction Determination ◽  
Strain Tensors

ABSTRACTThe determination by X-ray diffraction of the elastic strain tensors and the corresponding stress tensors in patterned lines of tungsten has been performed to investigate the effect of various passivation. For unpassivated lines, the stresses are biaxial and decrease with decreasing line width. Passivation over patterned lines results in triaxial tensile stress. The stress along the line is not changed by the passivation. The stress across the line decreases as the line width decreases. The third component of stress, perpendicular to the surface, which appears with the passivation, increases with decreasing line width. High compressive intrinsic stress in the passivation does not result in high tensile stress in the metal line.

Stresses in Passivated Films

1990 ◽  
Vol 188 ◽  
Author(s):  
Paul A. Flinn
Keyword(s):  
Tensile Stress ◽  
Accurate Determination ◽  
Silicon Oxynitride ◽  
X Ray Diffraction ◽  
X Ray ◽  
Curvature Measurement ◽  
Formation Of Cracks ◽  
Patterned Films ◽  
Strain Tensors

ABSTRACTAlthough wafer curvature measurement provides a rapid and accurate determination of stress in a uniform thin film, the technique is not applicable to patterned films. To study the stress in metal lines, and the effect of passivation on that stress, it is necessary to use X-ray diffraction. To obtain the sensitivity and precision required, a generalized focusing diffractometer (GFD), that had been developed especially for work on thin films, was used in this study.The elastic strain tensors for aluminum and aluminum-silicon films and patterned lines were determined by X-ray diffraction. The corresponding stress tensors were calculated with the use of the known elastic constants of aluminum. The effect of various oxide and oxynitride passivations was investigated. Passivation over uniform metal films has very little effect, while passivation over patterned metal results in substantial triaxial tensile stress in the metal. Contrary to the conventional wisdom, high compressive stress in the passivation does not result in additional tensile stress in the metal. A possible explanation for the frequently observed deleterious effect (increased tendency for formation of cracks and voids) of highly compressive silicon nitride and silicon oxynitride passivations will be discussed.

X-ray diffraction determination of a semiconductor epilayer unit cell oriented and distorted arbitrarily

1993 ◽  
Vol 26 (4A) ◽  
pp. A181-A187 ◽  
Author(s):  
B F Usher ◽  
G W Smith ◽  
S J Barnett ◽  
A M Keir ◽  
A D Pitt
Keyword(s):  
Unit Cell ◽  
X Ray Diffraction ◽  
X Ray ◽  
Diffraction Determination

X-Ray Diffraction Determination of Metallurgical Damage in Turbo Blower Rotor Shafts

1988 ◽  
Vol 142 ◽  
Author(s):  
John F. Porter ◽  
Dan O. Morehouse ◽  
Mike Brauss ◽  
Robert R. Hosbons ◽  
John H. Root ◽  
...  
Keyword(s):  
Residual Stress ◽  
Hole Drilling ◽  
X Ray Diffraction ◽  
X Ray ◽  
Turbo Blower ◽  
Diffraction Determination ◽  
Defence Research ◽  
Stress Profiles ◽  
Non Destructive

AbstractStudies have been ongoing at Defence Research Establishment Atlantic on the evaluation of non-destructive techniques for residual stress determination in structures. These techniques have included neutron diffraction, x-ray diffraction and blind-hole drilling. In conjunction with these studies, the applicability of these procedures to aid in metallurgical and failure analysis investigations has been explored. The x-ray diffraction technique was applied to investigate the failure mechanism in several bent turbo blower rotor shafts. All examinations had to be non-destructive in nature as the shafts were considered repairable. It was determined that residual stress profiles existed in the distorted shafts which strongly indicated the presence of martensitic microstuctures. These microstructures are considered unacceptable for these shafts due to the potential for cracking or in-service residual stress relaxation which could lead to future shaft distortion.

X‐ray diffraction determination of interfacial roughness correlation in SixGe1−x/Si and GaAs/AlxGa1−xAs superlattices

1992 ◽  
Vol 60 (24) ◽  
pp. 2986-2988 ◽  
Author(s):  
Y. H. Phang ◽  
D. E. Savage ◽  
T. F. Kuech ◽  
M. G. Lagally ◽  
J. S. Park ◽  
...  
Keyword(s):  
X Ray Diffraction ◽  
Interfacial Roughness ◽  
X Ray ◽  
Diffraction Determination

X-Ray Diffraction Determination of α-Quartz in Respirable and Total Dust Samples from Sand-Blasting Operations

AIHAJ ◽  
1974 ◽  
Vol 35 (11) ◽  
pp. 711-717 ◽  
Author(s):  
GARY C. ALLEN ◽  
BEHZAD SAMIMI ◽  
MORTON ZISKIND ◽  
HANS WEILL
Keyword(s):  
X Ray Diffraction ◽  
Sand Blasting ◽  
X Ray ◽  
Total Dust ◽  
Diffraction Determination

X-ray Determination and Analysis of Residual Stresses in Uniform Films and Patterned Lines of Tungsten

1993 ◽  
Vol 308 ◽  
Author(s):  
L. Maniguet ◽  
M. Ignat ◽  
M. Dupeux ◽  
J.J. Bacmann ◽  
Ph. Normandon
Keyword(s):  
Residual Stresses ◽  
Line Width ◽  
Edge Effects ◽  
Elastic Strain ◽  
Experimental Results ◽  
X Ray Diffraction ◽  
X Ray ◽  
Stress Tensors ◽  
Strain Tensors

ABSTRACTThe determination by X-ray diffraction of the elastic strain tensors and the corresponding stress tensors in uniform films and patterned lines of tungsten was used to investigate the effect of line width. The stresses were found to increase with increasing line width. These experimental results are discussed with respect to the values obtained from a model using a distributed force in the line. The results of the calculations are in agreement with the X-ray measurements. The edge effects appear to be significant for tungsten lines.

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