Single-Source Precursors to Vanadium Nitride Thin Films

1993 ◽  
Vol 327 ◽  
Author(s):  
Charles H. Winter ◽  
Valerie C. Viejo ◽  
James W. Proscia
Keyword(s):  
Vanadium Nitride ◽  
Silicon Substrates ◽  
Single Source ◽  
Film Properties ◽  
Single Source Precursors ◽  
Properties And Characterization ◽  
Nitride Coatings ◽  
Solar Control ◽  
Vanadium Tetrachloride ◽  
Vanadium Chloride

AbstractVanadium nitride films reflect infrared radiation and are candidates for solar control coatings for glass. Herein we report our efforts to prepare new precursors to vanadium nitride coatings. Treatment of vanadium tetrachloride with primary alkylamines in dichloromethane affords vanadium chloride amides of the empirical formula [VCI2(NHR)2(NH2R)2]. The characterization and properties of these compounds is presented. The complexes [VC12(NHR)2(NH2R)2] can be sublimed at ca. 100°C (0.1 mmHg) and serve as single-source precursors to vanadium carbonitride films. Films have been deposited in the temperature range of 400-600°C on glass and silicon substrates. The film properties and characterization will be overviewed.

Single-Source Precursors to Titanium Nitride Thin Films

1992 ◽  
Vol 282 ◽  
Author(s):  
Charles H. Winter ◽  
T. Suren Lewkebandara ◽  
Philip H. Sheridan ◽  
James W. Proscia
Keyword(s):  
Titanium Nitride ◽  
Photoelectron Spectroscopy ◽  
Silicon Substrates ◽  
Single Source ◽  
X Ray Diffraction ◽  
Single Source Precursors ◽  
X Ray ◽  
Low Levels ◽  
Nonpolar Organic ◽  
Substrate Temperatures

ABSTRACTThe syntheses of the first single-source precursors to gold-colored titanium nitride films are reported. The precursors have the empirical formula [TiCl2(NHR)2(NH2R)0–2] and [TiCl4(NH3)2] and are obtained upon treatment of titanium tetrachloride with alkylamines or ammonia in nonpolar organic solvents. Both precursors sublime without decomposition between 80–120 °C and 0.01–0.1 mmHg. Deposition of titanium nitride films on glass and silicon substrates was achieved using either precursor at substrate temperatures of 475–600 °C. The films were characterized by x-ray diffraction, resistivity measurements, and X-ray photoelectron spectroscopy. In particular, low levels of carbon and chlorine contaminants were observed in the films.

Solution state fluxionality and thermolysis reactions of bimetallic single source precursors for I-III-VI chalcopyrite materials

2018 ◽  
Vol 480 ◽  
pp. 189-196 ◽  
Author(s):  
Anh H.T. Nguyen ◽  
Jacob L. Tennant ◽  
Leah J. Maxton ◽  
Andrew W. Holland
Keyword(s):  
Single Source ◽  
Single Source Precursors ◽  
Solution State

Fluorinated Heterometallic β-Diketonates as Volatile Single-Source Precursors for the Synthesis of Low-Valent Mixed-Metal Fluorides

2011 ◽  
Vol 133 (4) ◽  
pp. 692-694 ◽  
Author(s):  
Anantharamulu Navulla ◽  
Alexander A. Tsirlin ◽  
Artem M. Abakumov ◽  
Roman V. Shpanchenko ◽  
Haitao Zhang ◽  
...  
Keyword(s):  
Single Source ◽  
Single Source Precursors ◽  
Mixed Metal ◽  
Metal Fluorides ◽  
Low Valent
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