The Growth Of High-Quality MCT Films by MBE Using in Situ Ellipsometry

1994 ◽  
Vol 299 ◽  
Author(s):  
K.K. Svitashev ◽  
S.A. Dvorwetsky ◽  
V.A. Shvets ◽  
A.S. Mardezhov ◽  
YU.G. Sidoroy ◽  
...  

AbstractThe ellipsometry and RHEED study of MCT grown on (112) CdTe and GaAs by MBE was carried out. The dependence of ellipsometric parameter on composition is evaluated. As shown we can measure the growth rate, the roughness changing, initial temperature and composition by ellipsometry in situ. We investigated the evolution of roughness of film surface. We observed the appearance of surface roughness at initial stage of MCT growth under various composition (XcdTe0÷0.4). The following growth in optimal growth condition (including constancy of substrate temperature) gives us the smoothing of the surface and supplies us the high-quality MCT films. It is found that under constant temperature of substrate heater we can not grow the thick, perfect film of MCT. The concentration, mobility and life time of carriers in MCT films were respectively: n=1.8*1014 ÷8.2*1015cm−3, μn=44000÷370000cm2 V−1 s−1, τ=40÷220ns;p=1.8*1015÷8.4*1015 cm−3, μp=215÷284 cm2V−1 s−1 τ=12÷20ns.

Author(s):  
Yoshichika Bando ◽  
Takahito Terashima ◽  
Kenji Iijima ◽  
Kazunuki Yamamoto ◽  
Kazuto Hirata ◽  
...  

The high quality thin films of high-Tc superconducting oxide are necessary for elucidating the superconducting mechanism and for device application. The recent trend in the preparation of high-Tc films has been toward “in-situ” growth of the superconducting phase at relatively low temperatures. The purpose of “in-situ” growth is to attain surface smoothness suitable for fabricating film devices but also to obtain high quality film. We present the investigation on the initial growth manner of YBCO by in-situ reflective high energy electron diffraction (RHEED) technique and on the structural and superconducting properties of the resulting ultrathin films below 100Å. The epitaxial films have been grown on (100) plane of MgO and SrTiO, heated below 650°C by activated reactive evaporation. The in-situ RHEED observation and the intensity measurement was carried out during deposition of YBCO on the substrate at 650°C. The deposition rate was 0.8Å/s. Fig. 1 shows the RHEED patterns at every stage of deposition of YBCO on MgO(100). All the patterns exhibit the sharp streaks, indicating that the film surface is atomically smooth and the growth manner is layer-by-layer.


2001 ◽  
Vol 693 ◽  
Author(s):  
X.Q. Xiu ◽  
R. Zhang ◽  
D.Q. Lu ◽  
L. Gu ◽  
B. Shen ◽  
...  

AbstractThe effect of introduction of additional HCl on the surface morphology and structural properties of hydride vapor phase epitaxy grown GaN during growth is investigated, and high quality GaN with smooth surface on sapphire is obtained by adding the additional HCl into the HVPE reactor. The result is attributed to the control of polarity of GaN films during growth. The additional HCl altered the equilibrium at the GaN growth front, and the reversible reaction decreased the nucleation density or growth rate. Further, lower growth rate promote the surface diffusion and the coalescence over (0001) plane. Additional HCl may improve the surface morphology by suppressing the (000-1) polarity growth in the initial stage of the growth.


1995 ◽  
Vol 388 ◽  
Author(s):  
A. Von Keudell

AbstractThe growth mechanisms for the deposition of hydrocarbon films (C:H-films) from a methane electron cyclotron resonance (ECR) plasma are investigated by means of in-situ ellipsometry. Ion bombardment during plasma-enhanced chemical vapor deposition of hydrocarbon films mainly governs the properties of the films and the total growth rate. the role of ions for the growth rate and the film properties is discussed in this paper. Films were deposited with varying RF-bias, resulting in a DC self-bias ranging from floating potential up to 100 V. the ion-induced modification of the film properties was investigated by a new technique using a double layer consisting of a polymer-like film with low optical absorption and a hard carbon film with high absorption on top. the interface between these layers was analysed after deposition by a layer-by-layer etching in an oxygen plasma at floating potential. From these data it is possible to determine with high accuracy the range of the ion-induced modification of the optical properties in the underlying polymer-like film. the thickness of this modified layer ranges from 6 Å at 30 V self-bias to 40 Å at 100 V self-bias, which is consistent with the range of hydrogen ions in polymerlike films as calculated by the computer code TRIM.SP.Based on the presented results, the growth of C:H-films and the resulting film properties can be modelled by the growth at activated sites at the film surface. these activated sites are represented by dangling bonds, induced by the ion bombardment. they also show up in the ellipsometric results during the deposition of C:H-films by a change of the optical response of the film surface.


Development ◽  
1977 ◽  
Vol 42 (1) ◽  
pp. 43-63
Author(s):  
Par Pierre Chibon

Growth rate and replacement of teeth in Amphibians The growth rate of teeth depends on age: it varies from 5 days for the first teeth, functional at hatching time, to 2 months for 2-year-old animals. The life time of a functional tooth is 20 days in the young larva and in the young post-metamorphic individual; it is not precisely known in adults. The proteins of organic matrices are elaborated in ergastoplasm, transported through the Golgi apparatus and Golgian vesicles, and deposited outside the cells within 1 h. Destruction of old teeth begins before metamorphosis; it is performed by pulp cells necrosis, and intervention of macrophages and osteoclasts; teeth are completely destroyed in situ, allowing growth of the replacement teeth. Thyroxine hastens tooth replacement.


Author(s):  
Xianghong Tong ◽  
Oliver Pohland ◽  
J. Murray Gibson

The nucleation and initial stage of Pd2Si crystals on Si(111) surface is studied in situ using an Ultra-High Vacuum (UHV) Transmission Electron Microscope (TEM). A modified JEOL 200CX TEM is used for the study. The Si(111) sample is prepared by chemical thinning and is cleaned inside the UHV chamber with base pressure of 1x10−9 τ. A Pd film of 20 Å thick is deposited on to the Si(111) sample in situ using a built-in mini evaporator. This room temperature deposited Pd film is thermally annealed subsequently to form Pd2Si crystals. Surface sensitive dark field imaging is used for the study to reveal the effect of surface and interface steps.The initial growth of the Pd2Si has three stages: nucleation, growth of the nuclei and coalescence of the nuclei. Our experiments shows that the nucleation of the Pd2Si crystal occurs randomly and almost instantaneously on the terraces upon thermal annealing or electron irradiation.


Author(s):  
Wilfried Sigle ◽  
Matthias Hohenstein ◽  
Alfred Seeger

Prolonged electron irradiation of metals at elevated temperatures usually leads to the formation of large interstitial-type dislocation loops. The growth rate of the loops is proportional to the total cross-section for atom displacement,which is implicitly connected with the threshold energy for atom displacement, Ed . Thus, by measuring the growth rate as a function of the electron energy and the orientation of the specimen with respect to the electron beam, the anisotropy of Ed can be determined rather precisely. We have performed such experiments in situ in high-voltage electron microscopes on Ag and Au at 473K as a function of the orientation and on Au as a function of temperature at several fixed orientations.Whereas in Ag minima of Ed are found close to <100>,<110>, and <210> (13-18eV), (Fig.1) atom displacement in Au requires least energy along <100>(15-19eV) (Fig.2). Au is thus the first fcc metal in which the absolute minimum of the threshold energy has been established not to lie in or close to the <110> direction.


1993 ◽  
Vol 324 ◽  
Author(s):  
C. Pickering ◽  
D.A.O. Hope ◽  
W.Y. Leong ◽  
D.J. Robbins ◽  
R. Greef

AbstractIn-situ dual-wavelength ellipsometry and laser light scattering have been used to monitor growth of Si/Si1−x,Gex heterojunction bipolar transistor and multi-quantum well (MQW) structures. The growth rate of B-doped Si0 8Ge0.2 has been shown to be linear, but that of As-doped Si is non-linear, decreasing with time. Refractive index data have been obtained at the growth temperature for x = 0.15, 0.20, 0.25. Interface regions ∼ 6-20Å thickness have been detected at hetero-interfaces and during interrupted alloy growth. Period-to-period repeatability of MQW structures has been shown to be ±lML.


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