Wafer-Scale Laser Pantography: IV. Physics of Direct Laser-Writing Micron-Dimension Transistors

1983 ◽  
Vol 29 ◽  
Author(s):  
Irving P. Herman ◽  
Bruce M. Mcwilliams ◽  
Fred Mitlitsky ◽  
Hon Wah Chin ◽  
Roderick A. Hyde ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Laser Beam ◽  
Silicon Surface ◽  
Small Scale ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Surface Reduction ◽  
Tungsten Hexafluoride ◽  
Direct Laser ◽  
Experimental Findings

ABSTRACTThe processes involved in the fabrication of micron-dimension transistors and small-scale integrated circuits using only the technique of direct laser-writing by localized pyrolytic surface reactions are discussed. New experimental findings in the deposition of tungsten by silicon. surface reduction of tungsten hexafluoride and doped polysilicon are presented. The techniques used to fabricate laser beam-written n-MOSFET's are being extended to make unipolar JFET's and bipolar lateral pnp transistors.

Direct laser writing on silicon surface for large area nanoplasmonic devices

2021 ◽  
Author(s):  
Akshdeep Sharma ◽  
Bhargav G ◽  
Ajay Kaushal ◽  
K N Bhat ◽  
Ambarish Ghosh
Keyword(s):  
Silicon Surface ◽  
Direct Laser Writing ◽  
Large Area ◽  
Laser Writing ◽  
Direct Laser

scholarly journals Direct laser writing of volumetric gradient index lenses and waveguides

2020 ◽  
Vol 9 (1) ◽  
Author(s):  
Christian R. Ocier ◽  
Corey A. Richards ◽  
Daniel A. Bacon-Brown ◽  
Qing Ding ◽  
Raman Kumar ◽  
...  
Keyword(s):  
Refractive Index ◽  
Integrated Circuits ◽  
Chromatic Dispersion ◽  
Laser Exposure ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Optical Elements ◽  
Optical Components ◽  
Direct Laser ◽  
Visible Wavelengths

AbstractDirect laser writing (DLW) has been shown to render 3D polymeric optical components, including lenses, beam expanders, and mirrors, with submicrometer precision. However, these printed structures are limited to the refractive index and dispersive properties of the photopolymer. Here, we present the subsurface controllable refractive index via beam exposure (SCRIBE) method, a lithographic approach that enables the tuning of the refractive index over a range of greater than 0.3 by performing DLW inside photoresist-filled nanoporous silicon and silica scaffolds. Adjusting the laser exposure during printing enables 3D submicron control of the polymer infilling and thus the refractive index and chromatic dispersion. Combining SCRIBE’s unprecedented index range and 3D writing accuracy has realized the world’s smallest (15 µm diameter) spherical Luneburg lens operating at visible wavelengths. SCRIBE’s ability to tune the chromatic dispersion alongside the refractive index was leveraged to render achromatic doublets in a single printing step, eliminating the need for multiple photoresins and writing sequences. SCRIBE also has the potential to form multicomponent optics by cascading optical elements within a scaffold. As a demonstration, stacked focusing structures that generate photonic nanojets were fabricated inside porous silicon. Finally, an all-pass ring resonator was coupled to a subsurface 3D waveguide. The measured quality factor of 4600 at 1550 nm suggests the possibility of compact photonic systems with optical interconnects that traverse multiple planes. SCRIBE is uniquely suited for constructing such photonic integrated circuits due to its ability to integrate multiple optical components, including lenses and waveguides, without additional printed supports.

scholarly journals Controlled formation of metallic tellurium nanocrystals in tellurite glasses using femtosecond direct laser writing

2021 ◽  
Author(s):  
Renato Grigolon Capelo ◽  
Juliana M.P. Almeida ◽  
Douglas Faza Franco ◽  
Gael Yves Poirier ◽  
Cleber Renato Mendonça ◽  
...  
Keyword(s):  
Tellurite Glasses ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Direct Laser

scholarly journals Femtosecond direct laser writing of gold nanostructures by ionic liquid assisted multiphoton photoreduction

2013 ◽  
Vol 3 (10) ◽  
pp. 1660 ◽  
Author(s):  
Wei-Er Lu ◽  
Yong-Liang Zhang ◽  
Mei-Ling Zheng ◽  
Yan-Peng Jia ◽  
Jie Liu ◽  
...  
Keyword(s):  
Ionic Liquid ◽  
Gold Nanostructures ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Direct Laser
Sign in / Sign up

Export Citation Format

Share Document