Fabrication of multi-functional silicon surface by direct laser writing

2018 ◽  
Author(s):  
Ashwani Kumar Verma ◽  
R. K. Soni
Keyword(s):  
Silicon Surface ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Direct Laser

Wafer-Scale Laser Pantography: IV. Physics of Direct Laser-Writing Micron-Dimension Transistors

1983 ◽  
Vol 29 ◽  
Author(s):  
Irving P. Herman ◽  
Bruce M. Mcwilliams ◽  
Fred Mitlitsky ◽  
Hon Wah Chin ◽  
Roderick A. Hyde ◽  
...  
Keyword(s):  
Integrated Circuits ◽  
Laser Beam ◽  
Silicon Surface ◽  
Small Scale ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Surface Reduction ◽  
Tungsten Hexafluoride ◽  
Direct Laser ◽  
Experimental Findings

ABSTRACTThe processes involved in the fabrication of micron-dimension transistors and small-scale integrated circuits using only the technique of direct laser-writing by localized pyrolytic surface reactions are discussed. New experimental findings in the deposition of tungsten by silicon. surface reduction of tungsten hexafluoride and doped polysilicon are presented. The techniques used to fabricate laser beam-written n-MOSFET's are being extended to make unipolar JFET's and bipolar lateral pnp transistors.

Direct laser writing on silicon surface for large area nanoplasmonic devices

2021 ◽  
Author(s):  
Akshdeep Sharma ◽  
Bhargav G ◽  
Ajay Kaushal ◽  
K N Bhat ◽  
Ambarish Ghosh
Keyword(s):  
Silicon Surface ◽  
Direct Laser Writing ◽  
Large Area ◽  
Laser Writing ◽  
Direct Laser

scholarly journals Controlled formation of metallic tellurium nanocrystals in tellurite glasses using femtosecond direct laser writing

2021 ◽  
Author(s):  
Renato Grigolon Capelo ◽  
Juliana M.P. Almeida ◽  
Douglas Faza Franco ◽  
Gael Yves Poirier ◽  
Cleber Renato Mendonça ◽  
...  
Keyword(s):  
Tellurite Glasses ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Direct Laser

scholarly journals Femtosecond direct laser writing of gold nanostructures by ionic liquid assisted multiphoton photoreduction

2013 ◽  
Vol 3 (10) ◽  
pp. 1660 ◽  
Author(s):  
Wei-Er Lu ◽  
Yong-Liang Zhang ◽  
Mei-Ling Zheng ◽  
Yan-Peng Jia ◽  
Jie Liu ◽  
...  
Keyword(s):  
Ionic Liquid ◽  
Gold Nanostructures ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Direct Laser

Direct laser writing and applications of dielectric microstructures with low refractive index contrast

2011 ◽  
Author(s):  
Vygantas Mizeikis ◽  
Vytautas Purlys ◽  
Lina Maigyte ◽  
Kestutis Staliunas ◽  
Saulius Juodkazis
Keyword(s):  
Refractive Index ◽  
Direct Laser Writing ◽  
Laser Writing ◽  
Refractive Index Contrast ◽  
Direct Laser ◽  
Index Contrast ◽  
Low Refractive Index

scholarly journals Fabrication of Ge2Sb2Te5 metasurfaces by direct laser writing technique

2021 ◽  
Vol 141 ◽  
pp. 107124
Author(s):  
D.V. Bochek ◽  
K.B. Samusev ◽  
D.A. Yavsin ◽  
M.V. Zhukov ◽  
M.F. Limonov ◽  
...  
Keyword(s):  
Direct Laser Writing ◽  
Laser Writing ◽  
Direct Laser
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