Kinetics of Photodeposition of Superconducting Films
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ABSTRACTKinetics of photodeposition of superconducting films was studied by using real time in-situ monitoring of gas phase species with mass spectrometry and thin-film properties by Fourier Transform Infrared (FTIR) spectrometry. A mass spectrometer was used to study wavelength and power dependent desorbed atoms and molecules during laser ablation process. FTIR was used to monitor the surface properties of thin film. Real time surface temperatures can be easily obtained by FTIR. By combinging mass spectrometry and FTIR, an optimum condition of making high-quality superconducting film can possibly be found.
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1993 ◽
Vol 51
◽
pp. 1172-1173
1993 ◽
Vol 140
(12)
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pp. 3588-3590
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2016 ◽
Vol 18
(42)
◽
pp. 29435-29446
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