Ion-Assisted Deposition of CaF2 Films on (111) Si
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ABSTRACTCaF2 films have been deposited by evaporation onto H-passivated (111) Si in the presence of an rf discharge. The discharge is seen to promote epitaxy. Emission spectroscopy reveals strong CaF2 bands and a weak Ca line, indicating that deposition is largely molecular but that some breakup of the CaF2 molecules occurs in the discharge. Electrical and optical properties of these films were substantially better than those of sputter-deposited films.
2006 ◽
Vol 18
(4)
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pp. 385-390
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2013 ◽
Vol 441
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pp. 11-14
2012 ◽
Vol 15
(2)
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pp. 125-130
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