The Relationship Between Emission Spectroscopy and Optical Properties of Amorphous Carbon Films

1987 ◽  
Vol 98 ◽  
Author(s):  
Richard M. Roth ◽  
Richard H. Jarman
Keyword(s):  
Optical Properties ◽  
Amorphous Carbon ◽  
Emission Spectroscopy ◽  
Carbon Films ◽  
Capacitively Coupled ◽  
Amorphous Carbon Films ◽  
Rf Glow Discharge ◽  
Discharge Parameters ◽  
The Relationship ◽  
Deposited Films

ABSTRACTEmission from CH and H radicals was monitored during the deposition of amorphous carbon films in a capacitively coupled rf glow discharge. Both the spectral and spatial distributions of the emission were studied. The relative intensity of the CH and H emission was found to be sensitive to changes in discharge parameters. Preliminary results indicate a correlation between the ratios of the CH to H emission intensities and the optical properties of the deposited films.

OPTICAL PROPERTIES OF TRIMETHYLBORON AND NITROGEN CODOPED AMORPHOUS CARBON FILMS

2002 ◽  
Vol 16 (06n07) ◽  
pp. 1096-1100 ◽  
Author(s):  
Y. HAYASHI ◽  
S. ISHIKAWA ◽  
T. SOGA ◽  
T. JIMBO ◽  
M. ADACHI ◽  
...  
Keyword(s):  
Optical Properties ◽  
Amorphous Carbon ◽  
Room Temperature ◽  
Chemical Vapor ◽  
Carbon Films ◽  
Rf Plasma ◽  
Amorphous Carbon Films ◽  
Fabry Perot ◽  
Pl Emission ◽  
Hydrogenated Amorphous

We report on the efficient photoluminescence (PL) and optical properties of hydrogenated amorphous carbon thin films codoped with nitrogen and trimethylboron (TMB) grown by rf plasma-enhanced chemical vapor deposition at room temperature. The study clearly shows the observation of discrete PL emission peaks. The PL intensity of the film deposited with 20 sccm TMB is more than 103 times than that of the film deposited without TMB. The change of optical bandgap and PL emission energy with TMB flow rate are discussed based on sp3 and sp2 C networks. Angular dependence of the PL spectra revealed that the origin of multiple sharp peaks is due to Fabry-Perot cavity interference effect.

Optical properties of nitrogenated tetrahedral amorphous carbon films

2002 ◽  
Vol 92 (3) ◽  
pp. 1242-1247 ◽  
Author(s):  
X. W. Zhang ◽  
W. Y. Cheung ◽  
N. Ke ◽  
S. P. Wong
Keyword(s):  
Optical Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon

Spectroscopic ellipsometric study of tetrahedral amorphous carbon films: optical properties and modelling

2001 ◽  
Vol 10 (3-7) ◽  
pp. 1132-1136 ◽  
Author(s):  
A. Canillas ◽  
M.C. Polo ◽  
J.L. Andújar ◽  
J. Sancho ◽  
S. Bosch ◽  
...  
Keyword(s):  
Optical Properties ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Tetrahedral Amorphous Carbon ◽  
Ellipsometric Study

Photoluminescence of RF Glow Discharge Amorphous Carbon Films

1991 ◽  
Vol 126 (1) ◽  
pp. 275-280 ◽  
Author(s):  
K. Fabisiak ◽  
F. Rozploch ◽  
J. Szatkowski ◽  
P. T. Argowski
Keyword(s):  
Glow Discharge ◽  
Amorphous Carbon ◽  
Carbon Films ◽  
Amorphous Carbon Films ◽  
Rf Glow Discharge
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