Optical Spectroscopic Profiling of Off-Axis Rf Sputtering

1991 ◽  
Vol 243 ◽  
Author(s):  
J. D. Klein ◽  
A. Yen
Keyword(s):  
Rf Sputtering ◽  
Emission Spectra ◽  
Optical Emission ◽  
Lattice Parameter ◽  
Index Of Refraction ◽  
Chamber Pressure ◽  
Sapphire Substrates ◽  
Optical Emission Spectra ◽  
Optical Fiber Bundle ◽  
Deposition Position

AbstractThe optical emission spectra resulting from if magnetron sputtering a BaTiO3 target were observed to survey substrate position implications. A collimated optical fiber bundle parallel to the plane of the sputter target was translated vertically and horizontally to spectroscopically profile the sputter process. The resulting Ar, O, Ba, and Ti emission intensity contours and the O/Ba and Ba/Ti intensity ratio contours suggest substrate positions that should provide uniform undistorted films. Films deposited on sapphire substrates were found to differ in orientation, lattice parameter, and index of refraction. The optimum offaxis deposition position shifted as the chamber pressure was varied.

Optical Spectroscopic Profiling of Ion Beam Sputtering

1991 ◽  
Vol 223 ◽  
Author(s):  
J. D. Klein ◽  
A. Yen
Keyword(s):  
Fiber Bundle ◽  
Ion Beam ◽  
Rf Sputtering ◽  
Emission Spectra ◽  
Incident Beam ◽  
Optical Emission ◽  
Ion Beam Sputtering ◽  
Beam Sputtering ◽  
Optical Emission Spectra ◽  
Optical Fiber Bundle

ABSTRACTThe optical emission spectra resulting from ion beam sputtering a BaTiO3 target were observed as a function of position. A collimated optical fiber bundle parallel to the plane of the sputter target was translated vertically and horizontally to spectroscopically profile the sputter process. The Ar contours provide an image of the incident beam and its distortion by the presence of the target. Comparison of the Ar and O contours indicate that the oxygen atmosphere in the vicinity of the target is determined by sputtering events as well as the incident beam. The shapes of the Ba and Ti contours are elliptical with some differences in intensity gradients. Comparison is made with species contours observed during rf sputtering of an Y-Ba-Cu-O target.

Examination of Ion Beam-Target Angle Effects by Optical Spectroscopic Profiling

1991 ◽  
Vol 235 ◽  
Author(s):  
J. D. Klein ◽  
A. Yen
Keyword(s):  
Ion Beam ◽  
Emission Spectra ◽  
Optical Emission ◽  
Target Surface ◽  
Normal Incidence ◽  
Ion Beam Sputtering ◽  
Similar Shape ◽  
Beam Sputtering ◽  
Optical Emission Spectra ◽  
Optical Fiber Bundle

ABSTRACTThe optical emission spectra resulting from ion beam sputtering a SrTiO3 target were observed as a function of position. A collimated optical fiber bundle parallel to the plane of die sputter target was translated vertically and horizontally to spectroscopically profile the sputter process. Three different angles of incidence of the beam to die target were examined for evidence of bombardment of candidate substrate positions by undesirable species. When the ion beam was at normal incidence to the target or 22.5* from normal incidence the Ar and O contours were of similar shape. However, when die target was inclined at an angle of 45* to die incident ion beam die O contours deviated markedly. Under these conditions it appears that there is a substantial oxygen flux in a direction normal to die target surface. Under these conditions die placement of a substrate facing die sputter target would probably result in undesirable bombardment of die growing film by energetic oxygen.

scholarly journals Optical Emission Spectra of Oxygen Plasma Produced by Radio-Frequency Plasma

2009 ◽  
Vol 18 (2) ◽  
pp. 102-107
Author(s):  
Do-Yeob Kim ◽  
Min-Su Kim ◽  
Tae-Hoon Kim ◽  
Ghun-Sik Kim ◽  
Hyun-Young Choi ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Oxygen Plasma ◽  
Emission Spectra ◽  
Optical Emission ◽  
Radio Frequency Plasma ◽  
Frequency Plasma ◽  
Optical Emission Spectra

scholarly journals REFORMING OF ETHANOL IN PLASMA-CATALYTIC SYSTEM WITH DC AND AC ROTATING GLIDING DISCHARGE

2021 ◽  
pp. 117-121
Author(s):  
O.A. Nedybaliuk ◽  
T.A. Tereshchenko ◽  
I.I. Fedirchyk ◽  
P.V. Tyshchuk ◽  
V.P. Demchina
Keyword(s):  
Synthesis Gas ◽  
Emission Spectra ◽  
Optical Emission ◽  
Reaction Chamber ◽  
Catalytic Reforming ◽  
Instantaneous Power ◽  
Wide Aperture ◽  
Ethanol Reforming ◽  
Gliding Discharge ◽  
Optical Emission Spectra

The article presents the results of the investigation of the reforming of ethanol into synthesis gas using a plasmacatalytic system with either AC or DC wide-aperture rotating gliding discharge. Current and voltage oscillograms of the wide-aperture rotating gliding discharge were measured. The time-dependence of the instantaneous power of the discharge in the air was built. The photographs of the discharge in the airflow and discharge during the ethanol reforming were compared. The optical emission spectra of the plasmas of the torches of AC and DC wide-aperture rotating gliding discharges were studied. The rotational and vibrational temperatures of the plasma torch in the reaction chamber were determined. The results of the gas-chromatography of the synthesis gas produced during the plasm-catalytic reforming of ethanol using either AC or DC rotating gliding discharge are presented.

scholarly journals PREPARATION OF DIAMOND FILMS BY DC ARC DISCHARGE AND IN SITU MEASUREMENTS OF THE PLASMA BY OPTICAL EMISSION SPECTRA

1990 ◽  
Vol 39 (12) ◽  
pp. 1965
Author(s):  
ZHANG FANG-QING ◽  
ZHANG YA-FEI ◽  
YANG YING-HU ◽  
LI JING-QI ◽  
CHEN GUANG-HUA ◽  
...  
Keyword(s):  
Arc Discharge ◽  
Diamond Films ◽  
Emission Spectra ◽  
Optical Emission ◽  
In Situ Measurements ◽  
Dc Arc ◽  
Optical Emission Spectra
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