Growth of BN Thin Films by Pulsed Laser Deposition
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ABSTRACTA new UHV system for pulsed laser deposition of materials is described, together with results from preliminary experiments for depositions of BN on Si. The system is designed to allow for in-situ diagnostics of the ablation plasma, as well as UHV preparation and characterization of clean sample substrates. The room temperature depositions of BN result in amorphous, B-rich films, whose particle content is a strong function of laser wavelength.
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2010 ◽
Vol 75
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pp. 202-207
2008 ◽
Vol 202
(22-23)
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pp. 5467-5470
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1996 ◽
Vol 35
(Part 2, No. 5B)
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pp. L630-L633
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2013 ◽
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pp. 247-251
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2011 ◽
Vol 01
(03)
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pp. 363-367
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1997 ◽
Vol 15
(5)
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pp. 2585-2591
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