Soi Technologies at the CNET

1983 ◽  
Vol 23 ◽  
Author(s):  
Soi group
Keyword(s):  
Single Crystal ◽  
Electrical Characterization ◽  
Large Single Crystal ◽  
Cw Laser ◽  
Single Crystal Films ◽  
Crystal Films ◽  
Laser Systems ◽  
Si Films

ABSTRACTFor the recrystallization of poly-Si films deposited on oxidized Si wafers, we focus our research on lamp and cw laser systems. We have obtained large single-crystal films using both techniques. “Selective annealing” allows localization of the remaining defects in the recrystallized films. Crystallographic as well as electrical characterization confirm the device-worthy potential of this material.

Beam Shaping for Cw Laser Recrystallization of Polysilicon Films

1982 ◽  
Vol 13 ◽  
Author(s):  
P. Zorabedian ◽  
C.I. Drowley ◽  
T.I. Kamins ◽  
T.R. Cass
Keyword(s):  
Single Crystal ◽  
Grain Boundaries ◽  
Beam Shaping ◽  
Grain Structure ◽  
Shaped Beam ◽  
Cw Laser ◽  
Laser Recrystallization ◽  
Single Crystal Films ◽  
Crystal Films ◽  
Polysilicon Films

ABSTRACTA shaped laser beam has been used for laterally seeded recrystallization of polysilicon films over oxide. Direct maps of the shaped-beam intensity distribution in the wafer plane are correlated with the grain structure of the recrystallized polysilicon. Using 60% overlapping of shaped-beam scans along <100> directions, we have obtained seeded areas one mm wide and 50 to 500μm long. These consist of 40μm-wide adjacent single-crystal strips regularly separated by low-angle grain boundaries extending laterally away from the seed openings. The spacing between grain boundaries is equal to the scan spacing, providing a means for controlling the location of grain boundaries in otherwise defect-free, single-crystal films.

Structure of Palladium Single-Crystal Films Prepared by Flash Evaporation onto (001) NaCl Substrates

1970 ◽  
Vol 28 ◽  
pp. 456-457
Author(s):  
L. E. Murr ◽  
G. Wong
Keyword(s):  
Single Crystal ◽  
High Vacuum ◽  
Ultra High Vacuum ◽  
High Rate ◽  
Flash Evaporation ◽  
Optimum Load ◽  
Single Crystal Films ◽  
Crystal Films ◽  
A Current

Palladium single-crystal films have been prepared by Matthews in ultra-high vacuum by evaporation onto (001) NaCl substrates cleaved in-situ, and maintained at ∼ 350° C. Murr has also produced large-grained and single-crystal Pd films by high-rate evaporation onto (001) NaCl air-cleaved substrates at 350°C. In the present work, very large (∼ 3cm2), continuous single-crystal films of Pd have been prepared by flash evaporation onto air-cleaved (001) NaCl substrates at temperatures at or below 250°C. Evaporation rates estimated to be ≧ 2000 Å/sec, were obtained by effectively short-circuiting 1 mil tungsten evaporation boats in a self-regulating system which maintained an optimum load current of approximately 90 amperes; corresponding to a current density through the boat of ∼ 4 × 104 amperes/cm2.

The P-H-T effects on the electric resistance and magnetoresistance of La0.7Sr0.1Pb0.2MnO3 single crystal films

2001 ◽  
Vol 27 (6) ◽  
pp. 451-453 ◽  
Author(s):  
S. S. Kucherenko ◽  
V. P. Pashchenko ◽  
P. I. Polyakov ◽  
S. I. Khartsev ◽  
V. A. Shtaba
Keyword(s):  
Single Crystal ◽  
Electric Resistance ◽  
Single Crystal Films ◽  
Crystal Films

Thermal stability of indium nitride single crystal films

1993 ◽  
Vol 73 (11) ◽  
pp. 7969-7971 ◽  
Author(s):  
Qixin Guo ◽  
Osamu Kato ◽  
Akira Yoshida
Keyword(s):  
Thermal Stability ◽  
Single Crystal ◽  
Indium Nitride ◽  
Single Crystal Films ◽  
Crystal Films ◽  
Thermal Stability Of
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