The Effect of A Passivation Over-Layer on the Mechanisms of Stress Relaxation in Continuous Films and Narrow Lines of Aluminum
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AbstractStress relaxation was studied in bare and nitride-covered continuous films and narrow lines of aluminum. The rate of relaxation in unpassivated metallizations is shown to be consistent with a dislocation-controlled mechanism. Relaxation in passivated lines appears to depend on grain boundary diffusion-controlled void growth. In passivated continuous films, two rate-controlling mechanisms appear to operate in sequence.
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2000 ◽
Vol 122
(3)
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pp. 294-299
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2006 ◽
pp. 141-148
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2009 ◽
Vol 289-292
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pp. 763-767
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1991 ◽
Vol 12
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pp. 279-287
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2012 ◽
Vol 60
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pp. 3057-3062
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2003 ◽
Vol 83
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pp. 29-38
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