Multiwafer Production of Long Wavelength Epitaxial Material

1990 ◽  
Vol 216 ◽  
Author(s):  
M. Heyen ◽  
D. Schmitz ◽  
G. Strauch ◽  
H. JÜrgensen
Keyword(s):  
Gas Phase ◽  
Low Pressure ◽  
Long Wavelength ◽  
Horizontal Reactor ◽  
Compositional Uniformity

Low pressure MOVPE in a horizontal reactor has proven to be capable of yielding uniform InP, GalnAs and GaInAsP layers [1, 2]. However, the complexity of some devices as MQW lasers and HEMTs require even further improvement in thickness and compositional uniformity. This can be achieved by using the technique of sub-strate rotation to overcome gas phase depletion problems and geometry related non uniformities.

scholarly journals NMR imaging of low pressure, gas-phase transport in packed beds using hyperpolarized xenon-129

AIChE Journal ◽  
2015 ◽  
Vol 61 (11) ◽  
pp. 4013-4019 ◽  
Author(s):  
Galina Pavlovskaya ◽  
Joseph Six ◽  
Thomas Meersman ◽  
Navin Gopinathan ◽  
Sean P. Rigby
Keyword(s):  
Gas Phase ◽  
Low Pressure ◽  
Nmr Imaging ◽  
Packed Beds ◽  
Hyperpolarized Xenon ◽  
Gas Phase Transport ◽  
Phase Transport

scholarly journals Composition Determination of Low-Pressure Gas-Phase Mixtures by 1H NMR Spectroscopy

2019 ◽  
Vol 91 (7) ◽  
pp. 4429-4435 ◽  
Author(s):  
Christopher L. Suiter ◽  
Mark O. McLinden ◽  
Thomas J. Bruno ◽  
Jason A. Widegren
Keyword(s):  
Nmr Spectroscopy ◽  
Gas Phase ◽  
1H Nmr ◽  
1H Nmr Spectroscopy ◽  
Low Pressure ◽  
Composition Determination

Gasphasen-Reaktionen, 58 [1, 2] β-Chlorethylazid: HCl-Eliminierung und Pyrolyse / Gas Phase Reactions, 58 [1, 2] β-Chloroethyl Azide: HCl Elimination and Pyrolysis

1987 ◽  
Vol 42 (3) ◽  
pp. 301-307 ◽  
Author(s):  
Hans Bock ◽  
Ralph Dammel
Keyword(s):  
Real Time ◽  
Gas Phase ◽  
Flow System ◽  
Chemical Activation ◽  
Thermolysis Product ◽  
Low Pressure ◽  
Gas Analysis ◽  
Gas Phase Reactions ◽  
Pressure Flow ◽  
By Products

The HCl elimination from β-chloroethyl azide (1-azido-2-chloroethane) over potassium tert. butanolate at 350 K in a low pressure flow system is optimized using PE spectroscopic real-time gas analysis. The highly explosive vinyl azide formed can be purified by cool-trapping the by-products. Its subsequent and virtually hazard-free pyrolysis yields 2H-azirine, which can be isolated at temperatures below 240 K.In contrast, the direct pyrolysis of β-chloroethyl azide requires temperatures above 710 K and results in a simultaneous split-off of both HCl and N2, yielding acetonitrile as the main thermolysis product. No intermediates such as β-chloroethanimine or ketenimine are observed, a result which is interpreted in terms of chemical activation

Homogeneous Gas Phase Nucleation of Silane in Low Pressure Chemical Vapor Deposition (LPCVD)

1988 ◽  
Vol 135 (9) ◽  
pp. 2378-2379 ◽  
Author(s):  
Z. M. Qian ◽  
H. Michiel ◽  
A. Van Ammel ◽  
J. Nijs ◽  
R. Mertens
Keyword(s):  
Chemical Vapor Deposition ◽  
Gas Phase ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Low Pressure ◽  
Pressure Chemical ◽  
Phase Nucleation
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