Characterization of Ion-Implanted Aluminum and Iron by Spectroscopic Ellipsometry

1990 ◽  
Vol 201 ◽  
Author(s):  
J. S. Brodkin ◽  
W. Franzen ◽  
R. J. Culbertson ◽  
J. M. Williams
Keyword(s):  
Aluminum Alloy ◽  
Spectroscopic Ellipsometry ◽  
Optical Constants ◽  
Chromium Ions ◽  
Non Destructive ◽  
Non Destructive Characterization ◽  
Ion Implanted

AbstractThe change in the optical constants of aluminum alloy and iron samples caused by implantation with nitrogen and chromium ions has been investigated by spectroscopic ellipsometry. The objective is to develop a method for simple, non-destructive characterization of ion-implanted metals.

Non-destructive characterization of III–V alloy multilayer structures using spectroscopic ellipsometry

1993 ◽  
Vol 233 (1-2) ◽  
pp. 171-175 ◽  
Author(s):  
C. Pickering ◽  
R.T. Carline ◽  
N.S. Garawal ◽  
J.L. Stehlé ◽  
J.P. Piel ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Multilayer Structures ◽  
Non Destructive ◽  
Non Destructive Characterization

Non-Destructive Characterization of Activated Ion-Implanted Doping Profiles Based on Photomodulated Optical Reflectance

2011 ◽  
Author(s):  
Janusz Bogdanowicz ◽  
Trudo Clarysse ◽  
Alain Moussa ◽  
Jay Mody ◽  
Pierre Eyben ◽  
...  
Keyword(s):  
Optical Reflectance ◽  
Doping Profiles ◽  
Non Destructive ◽  
Non Destructive Characterization ◽  
Ion Implanted

scholarly journals Non-destructive characterization of nitrogen-implanted silicon-on-insulator structures by spectroscopic ellipsometry

1989 ◽  
Vol 2 (1-3) ◽  
pp. 131-137 ◽  
Author(s):  
M. Fried ◽  
T. Lohner ◽  
J.M.M. De Nijs ◽  
A. Van Silfhout ◽  
L.J. Hanekamp ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Silicon On Insulator ◽  
Non Destructive ◽  
Non Destructive Characterization

Non-destructive characterization of ion-implanted diamond

Vacuum ◽  
1999 ◽  
Vol 55 (3-4) ◽  
pp. 207-217 ◽  
Author(s):  
Z.Q. Ma ◽  
B.X. Liu ◽  
H. Naramoto ◽  
Y. Aoki ◽  
S. Yamamoto ◽  
...  
Keyword(s):  
Non Destructive ◽  
Non Destructive Characterization ◽  
Ion Implanted

scholarly journals Non-destructive characterization of corroded glass surfaces by spectroscopic ellipsometry

2018 ◽  
Vol 481 ◽  
pp. 260-266 ◽  
Author(s):  
Tiffany C. Kaspar ◽  
Joelle T. Reiser ◽  
Joseph V. Ryan ◽  
Nathalie A. Wall
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Glass Surfaces ◽  
Non Destructive ◽  
Non Destructive Characterization
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