Non-Contact, Non-Destructive Characterization of Crystal Quality in Ultra-Shallow ion Implanted Silicon Wafers Before and after Annealing

Author(s):  
Masahiro Yoshimoto ◽  
Hiroshi Nishigaki ◽  
Hiroshi Harima ◽  
Toshiyuki Isshiki ◽  
Kitaek Kang ◽  
...  
1990 ◽  
Vol 201 ◽  
Author(s):  
J. S. Brodkin ◽  
W. Franzen ◽  
R. J. Culbertson ◽  
J. M. Williams

AbstractThe change in the optical constants of aluminum alloy and iron samples caused by implantation with nitrogen and chromium ions has been investigated by spectroscopic ellipsometry. The objective is to develop a method for simple, non-destructive characterization of ion-implanted metals.


2011 ◽  
Author(s):  
Janusz Bogdanowicz ◽  
Trudo Clarysse ◽  
Alain Moussa ◽  
Jay Mody ◽  
Pierre Eyben ◽  
...  

2014 ◽  
Vol 1065-1069 ◽  
pp. 1791-1794 ◽  
Author(s):  
Son Tung Pham

The objective of this study is to realize a non-destructive characterization of cementitious materials using ultrasonic method. The motivation of our work is to show that the ultrasound can be applied not only in medical imaging but also in the assessment of construction materials, which is not widely known in this domain. In order to solve the problem, the ultrasonic velocity measurement was performed on the samples before and after carbonation of a standardized mortar at different periods. The results offer the possibility to determine the mechanical properties such as Young modulus E, shear modulus G and Poisson's ratio. This is an advantage for in-situ structures in comparison with destructive methods that require destroying the samples. The main contributions of this study are: 1) Ultrasonic occultation of cement materials is a reliable method with a small margin of error; 2) The values ​​of mechanical properties found by ultrasonic method are consistent with theoretical values ​​found in the literature; 3) The evolution of these mechanical properties is consistent with the densification of the microstructure during carbonation due to the formation of CaCO3.


Vacuum ◽  
1999 ◽  
Vol 55 (3-4) ◽  
pp. 207-217 ◽  
Author(s):  
Z.Q. Ma ◽  
B.X. Liu ◽  
H. Naramoto ◽  
Y. Aoki ◽  
S. Yamamoto ◽  
...  

2017 ◽  
Vol 25 (6) ◽  
pp. 42-47 ◽  
Author(s):  
Reeju Pokharel ◽  
Donald W. Brown ◽  
Bjørn Clausen ◽  
Darrin D. Byler ◽  
Timothy L. Ickes ◽  
...  

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