Metal Surface Morphology Characterization Using Laser Scatterometry

1990 ◽  
Vol 181 ◽  
Author(s):  
S. M. Gaspar ◽  
K. C. Hickman ◽  
J. R. McNeil ◽  
R. D. Jacobson ◽  
G. P. Lindauer ◽  
...  

ABSTRACTWe have applied angle-resolved laser scatterometry to characterize the morphology of metals deposited under various conditions. Scatterometry is a rapid, noncontact and nondestructive diagnostic which yields surface statistics including rms roughness and power spectral density of the microstructure.

2003 ◽  
Vol 76 (1) ◽  
pp. 220-238 ◽  
Author(s):  
Arun Ghosh ◽  
R. S. Rajeev ◽  
A. K. Bhattacharya ◽  
A. K. Bhowmick ◽  
S. K. De ◽  
...  

Abstract This paper reports the results of Atomic Force Microscopic (AFM) studies on blends of silicone rubber and fluororubber based on tetrafluoroethylene/propylene/vinylidene fluoride terpolymer. The surface morphology of the single component rubbers and their blends and the effect of the blend ratio on the surface morphology were studied using analysis techniques of AFM images including surface plot, section analysis, roughness analysis and power spectral density analysis. The compatibility of the two rubber phases depends on the dimensions of the granules on the surface, measured from the section analysis and the histograms derived from the section analysis. As predicted by the histograms, the surface morphology of the blends is governed primarily by the silicone rubber, even at low concentration of silicone rubber in the blend. The height image, amplitude image, surface plot and section analysis display a distinct surface morphology for the 50/50-silicone rubber/fluororubber blend. The roughness and power spectral density (PSD) analyses show that the 50/50-blend exhibits maximum surface roughness. The results of surface energy measurements of the single component rubbers and their blends in general conform to the findings of AFM studies.


2009 ◽  
Vol 2 (1) ◽  
pp. 40-47
Author(s):  
Montasser Tahat ◽  
Hussien Al-Wedyan ◽  
Kudret Demirli ◽  
Saad Mutasher

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