Metal Surface Morphology Characterization Using Laser Scatterometry
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ABSTRACTWe have applied angle-resolved laser scatterometry to characterize the morphology of metals deposited under various conditions. Scatterometry is a rapid, noncontact and nondestructive diagnostic which yields surface statistics including rms roughness and power spectral density of the microstructure.
2007 ◽
Vol 253
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pp. 6196-6202
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2003 ◽
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pp. 220-238
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pp. 40-47
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2021 ◽
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pp. 107912
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2021 ◽
Vol 1051
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pp. 012043
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