On the Stability of Hetastable and Amorphous Pvd-Compound Films
Keyword(s):
ABSTRACTIn using low temperature physical vapour deposition (PVD) techniques new metastable and amorphous materials can be deposited. Structural order in a coating is produced largely by the mobility of the adatoms. Low mobility does not allow the formation of equilibrium phases and metastable and/or amorphous structures are observed. These coatings have sufficient thermal stability for tools, and for both wear- and corrosion-protection. Examples are given within the systems Al-O-N, Ti-Al-N and Cr-Al-N and the properties, crystalline and thermodynamic state of the coatings are characterized. An example of decomposition phenomena is given in metastable thin coatings by the Ti-Zr-N system.
1990 ◽
Vol 41
(3)
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pp. 305-313
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2019 ◽
Vol 377
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pp. 124912
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1988 ◽
Vol 46
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pp. 448-449
1996 ◽
Vol 166
(1-4)
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pp. 628-630
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