Measurement of Micromechanical Properties Using Atomic Force Microscope with Capacitative
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AbstractA new UHV atomic force microscope for the study of micromechanical properties is described. A capacitance technique is used, which enables simultaneous measurement of forces perpendicular and parallel to the surface (i.e., load and friction), and has low noise down to frequencies below 0.1 Hz. Preliminary results for Ir- and W-tips sliding on graphite and silicon, respectively, demonstrate the capabilities of this new instrument.
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2006 ◽
Vol 77
(4)
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pp. 043701
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1999 ◽
Vol 74
(1-3)
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pp. 134-138
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1998 ◽
Vol 67
(1-3)
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pp. 215-219
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1992 ◽
Vol 50
(2)
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pp. 1146-1147
1989 ◽
Vol 47
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pp. 32-33
1993 ◽
Vol 51
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pp. 704-705