Heavily-Doped n+-GaAs with Low Compensation Grown by Atmospheric OMVPE
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ABSTRACTAtmospheric OMVPE has been used, with SiH4 as the dopant, to grow n+-GaAs with free-carrier levels upto about 9e18 cm−3. Following a steady rise in carrier concentration with dopant pressure, the carrier concentration is seen to fall rapidly with further doping. Hall-effect and quantitative SIMS data have been used to obtain the distribution of silicon onto donor and acceptor sites. It is seen that there is negligible compensation upto free-carrier levels of about 5e18 cm−3. The mechanism of compensation throughout the doping range is discussed.
2018 ◽
Vol 31
(3)
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pp. 20
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1999 ◽
Vol 103
(25)
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pp. 5280-5288
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2000 ◽
Vol 154-155
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pp. 263-268
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1985 ◽
Vol 117
(1)
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pp. 155-158
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