The Study of Damage Profile of Ion Implanted Layer on Si by Spectroscopic Ellipsometry

1982 ◽  
Vol 14 ◽  
Author(s):  
Jinshen Luo ◽  
P.J. Mc Marr ◽  
K. Vedam
Keyword(s):  
Dielectric Function ◽  
Spectral Range ◽  
Spectroscopic Ellipsometry ◽  
Ion Implanted

ABSTRACTWe have determined the dielectric function of silicon samples which were implanted with 100-150 KeV P, As, Si ions to doses of 2·1014-1·1016cm−2, by a rotating analyser Automated ellipsometer in the spectral range 1.77− 4.59 eV. These data have been analyzed using a simplified three layer model.The results are compared with an earlier ellipsometric investigation [2].

Determination of the complex dielectric function of ion implanted amorphous SiC by spectroscopic ellipsometry

2003 ◽  
Vol 195 (1) ◽  
pp. 277-281 ◽  
Author(s):  
E. R. Shaaban ◽  
T. Lohner ◽  
P. Petrik ◽  
N. Q. Khánh ◽  
M. Fried ◽  
...  
Keyword(s):  
Dielectric Function ◽  
Spectroscopic Ellipsometry ◽  
Complex Dielectric Function ◽  
Amorphous Sic ◽  
Ion Implanted

Dielectric function of hexagonal AlN films determined by spectroscopic ellipsometry in the vacuum-uv spectral range

1999 ◽  
Vol 59 (3) ◽  
pp. 1845-1849 ◽  
Author(s):  
T. Wethkamp ◽  
K. Wilmers ◽  
C. Cobet ◽  
N. Esser ◽  
W. Richter ◽  
...  
Keyword(s):  
Dielectric Function ◽  
Spectral Range ◽  
Spectroscopic Ellipsometry ◽  
Vacuum Uv

IR-VUV Dielectric Function of Al1−xInxN determined by Spectroscopic Ellipsometry

2000 ◽  
Vol 639 ◽  
Author(s):  
A. Kasic ◽  
M. Schubert ◽  
B. Rheinländer ◽  
J. Off ◽  
F. Scholz ◽  
...  
Keyword(s):  
Dielectric Function ◽  
Spectral Range ◽  
Spectroscopic Ellipsometry ◽  
Vacuum Ultraviolet ◽  
Phonon Mode ◽  
Film Growth ◽  
Mode Frequency ◽  
Buffer Layers ◽  
Mid Infrared ◽  
Theoretical Predictions

ABSTRACTSpectroscopic Ellipsometry from the mid-infrared (mid-ir) to the vacuum-ultraviolet (vuv) spectral range (350 cm−1 … 8.8 eV) is used to study the optical properties of hexagonal MOVPE-grown Al1−xInxN films for 0.11 ≤ × ≤ 0.21. The AlInN E1(TO) phonon shows a onemode behavior in contrast to recent theoretical predictions [H. Grille, Ch. Schnittler, and F. Bechstedt, Phys. Rev. B 61, 6091 (2000)]. Approximately 120 nm thick Al1−xInxN films grown on slightly compressively strained hexagonal GaN buffer layers reveal the influence of in-plane strain on the E1(TO) phonon mode frequencies. Al1−xInxN deposited directly on [0001] sapphire substrate possesses E1(TO) mode frequency which indicate fully relaxed film growth. For highquality Al0.890In0.110N one A1(LO) phonon mode was observed. Furthermore, we present the complex dielectric function of hexagonal Al0.872In0.128N from the mid-ir to vuv spectral range.

From Semiconductor to Metal in a Flash: Observing Ultrafast Laser-Induced Phase Transformations

1997 ◽  
Vol 481 ◽  
Author(s):  
J. P. Callan ◽  
A. M.-T. Kim ◽  
L. Huangt ◽  
E. N. Glezer ◽  
E. Mazur
Keyword(s):  
Phase Transformations ◽  
Dielectric Function ◽  
Spectral Range ◽  
Laser Excitation ◽  
Spectroscopic Technique ◽  
Ultrafast Laser ◽  
Lattice Heating ◽  
Fs Laser

ABSTRACTWe use a new broadband spectroscopic technique to measure ultrafast changes in the dielectric function of a material over the spectral range 1.5–3.5 eV following intense 70-fs laser excitation. The results reveal the nature of the phase transformations which occur in the material following excitation. We studied the response of GaAs and Si. For GaAs, there are three distinct regimes of behavior as the pump fluence is increased — lattice heating, lattice disordering, and a semiconductor-to-metal transition.

Spectroscopic ellipsometry study of N+ ion-implanted ethylene–norbornene films

2014 ◽  
Vol 98 ◽  
pp. 7-13 ◽  
Author(s):  
M. Šiljegović ◽  
Z.M. Kačarević-Popović ◽  
M. Stchakovsky ◽  
A.N. Radosavljević ◽  
S. Korica ◽  
...  
Keyword(s):  
Spectroscopic Ellipsometry ◽  
Ion Implanted

Dielectric function of thin polypyrrole and Prussian blue films by spectroscopic ellipsometry

1983 ◽  
Vol 6 ◽  
pp. 309-316 ◽  
Author(s):  
H. Arwin ◽  
D.E. Aspnes ◽  
R. Bjorklund ◽  
I. Lundström
Keyword(s):  
Prussian Blue ◽  
Dielectric Function ◽  
Spectroscopic Ellipsometry

Femtosecond-time-resolved imaging of the dielectric function of ZnO in the visible to near-IR spectral range

2019 ◽  
Vol 115 (21) ◽  
pp. 212103 ◽  
Author(s):  
O. Herrfurth ◽  
T. Pflug ◽  
M. Olbrich ◽  
M. Grundmann ◽  
A. Horn ◽  
...  
Keyword(s):  
Dielectric Function ◽  
Spectral Range ◽  
Time Resolved ◽  
Near Ir ◽  
Time Resolved Imaging

Dielectric function of ZnTe nanocrystals by spectroscopic ellipsometry

2009 ◽  
Vol 20 (30) ◽  
pp. 305702 ◽  
Author(s):  
F Ahmed ◽  
A En Naciri ◽  
J J Grob ◽  
M Stchakovsky ◽  
L Johann
Keyword(s):  
Dielectric Function ◽  
Spectroscopic Ellipsometry
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