Hydrogen Ion Beam Smoothening of Oxygen Roughened Ge(001) Surfaces

1988 ◽  
Vol 131 ◽  
Author(s):  
K. M. Horn ◽  
E. Chason ◽  
J. Y. Tsao ◽  
S. T. Picraux
Keyword(s):  
Chemical Reaction ◽  
Chemical Etching ◽  
Ion Beam ◽  
Low Energy ◽  
Hydrogen Ion ◽  
Rate Of Recovery ◽  
Oxygen Gas

ABSTRACTA smooth Ge(001) surface can be severely roughened by chemical etching with oxygen gas and then returned to its original smoothness by exposure to hydrogen. The rate of recovery of the surface depends strongly on temperature, as well as on whether the hydrogen is introduced as a low energy ion beam or simply as a gas. The roughness induced in the surface by etching is “locked-in” after removal of the oxygen gas through pinning of ledges by residual contamination. This pinning prevents the surface from smoothening thermally. The introduction of hydrogen to the surface promotes a chemical reaction which frees the pinned sites and allows thermal smoothening to proceed.

GaAs surface cleaning by low energy hydrogen ion beam treatment

2002 ◽  
Vol 20 (4) ◽  
pp. 1492-1497 ◽  
Author(s):  
N. Razek ◽  
K. Otte ◽  
T. Chassé ◽  
D. Hirsch ◽  
A. Schindler ◽  
...  
Keyword(s):  
Ion Beam ◽  
Surface Cleaning ◽  
Low Energy ◽  
Hydrogen Ion ◽  
Gaas Surface ◽  
Ion Beam Treatment

Permeation of hydrogen into silicon during low‐energy hydrogen ion beam bombardment

1987 ◽  
Vol 51 (7) ◽  
pp. 490-492 ◽  
Author(s):  
M. W. Horn ◽  
J. M. Heddleson ◽  
S. J. Fonash
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
Hydrogen Ion

Surface modification of polystyrene by low energy hydrogen ion beam

2006 ◽  
Vol 514 (1-2) ◽  
pp. 182-187 ◽  
Author(s):  
Xiangdong Xu ◽  
Raymund Wai Man Kwok ◽  
Woon Ming Lau
Keyword(s):  
Surface Modification ◽  
Ion Beam ◽  
Low Energy ◽  
Hydrogen Ion

Ar+ ion irradiation in oxygen environment for improving wettability of polymethylmethacrylate

1996 ◽  
Vol 11 (11) ◽  
pp. 2933-2939 ◽  
Author(s):  
Seok-Keun Koh ◽  
Won-Kook Choi ◽  
Jun-Sik Cho ◽  
Seok-Kyun Song ◽  
Young-Man Kim ◽  
...  
Keyword(s):  
Chemical Reaction ◽  
Ion Irradiation ◽  
Ion Beam ◽  
Polymer Surface ◽  
Wetting Angle ◽  
Energetic Ions ◽  
Oxygen Ion ◽  
Deposited Metal ◽  
Oxygen Gas ◽  
Surface Changes

Ion irradiation with various oxygen flow rates has been carried out to improve the wettability of polymethylmethacrylate (PMMA) to water and to enhance the adhesion between Al and the polymer. Ar+ ion and oxygen ion were irradiated on the polymer, and amounts of ions were changed from 5 × 1014 Ar+/cm2 to 5 × 1016 Ar+/cm2 by a broad ion beam source. Oxygen gas from 0 ml/min to 7 ml/min was flowed near the polymer surface during the ion irradiation, and the energy of ions was changed from 500 eV to 1500 eV. The wetting angle was reduced from 68° to 49° with the Ar+ ion irradiation only at 1 keV energy, to 43° with the oxygen ion irradiation, and dropped to 8° with Ar+ ion irradiation with flowing 4 ml/min oxygen gas near the polymer surface. Changes of wetting angle with oxygen gas and Ar+ ion irradiation were explained by a two-step chemical reaction among polymer matrix, energetic ions, and oxygen gas. The effects of Ar+ ion and oxygen ion irradiation were explained by considering formation of hydrophilic groups due to a reaction between irradiated polymer chain by energetic ion irradiation and blown oxygen gas, and enhanced adhesion between Al and PMMA was explained by the formation of electron acceptor groups in polymer and electron donors in metal, and by the chemical reaction in the interface between irradiated polymer surface and deposited metal.

Positive and negative hydrogen ion reflections of low-energy atomic and molecular hydrogen ion beam from HOPG and Mo surfaces

2020 ◽  
Vol 91 (1) ◽  
pp. 013313
Author(s):  
Nozomi Tanaka ◽  
Fumiya Ikemoto ◽  
Ippei Yamada ◽  
Yuji Shimabukuro ◽  
Masashi Kisaki ◽  
...  
Keyword(s):  
Molecular Hydrogen ◽  
Ion Beam ◽  
Low Energy ◽  
Hydrogen Ion ◽  
Negative Hydrogen Ion
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