Laser Induced Chemical Etching of Composite Structure of Ferrite and Sendust
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Al Alloy
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ABSTRACTMaskless etching of the composite structure of Mn-Zn ferrite and sendust (Fe-Si-Al alloy) was performed by focused argon-ion-laser irradiation in a CCl4 atmosphere and aqueous solutions. Only a mixture of KOH and NaOH aqueous solutions was found to smoothly etch the composite structure by thermochemical reaction using laser irradiation. A maximum etching rate of 14 μm/sec was obtained for sendust-on-ferrite substrates.
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1989 ◽
Vol 17
(9)
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pp. 642-651
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1998 ◽
Vol 34
(2)
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pp. 154-157
1988 ◽
Vol 47
(4)
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pp. 319-325
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1972 ◽
Vol 50
(20)
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pp. 3381-3383
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