Ion Beam Deposition of Diamond-Like Coatings

1988 ◽  
Vol 128 ◽  
Author(s):  
Anton C. Greenwald ◽  
James K. Hirvonen ◽  
Narendra K. Jaggi
Keyword(s):  
Ion Beam ◽  
Ion Beams ◽  
Silicon Wafers ◽  
High Current ◽  
Carbon Ion ◽  
Ion Beam Deposition ◽  
Beam Deposition

ABSTRACTMass analyzed and non-mass analyzed carbon ion beams were used to deposit coatings on polished silicon wafers. Extremely, hard dense coatings that are structurally similar to i-carbon as determined by Ramon spectroscopy were achieved with high current beams of methane and argon. Residual contaminants of oxygen and nitrogen were minimized.

A high-current low-energy multi-ion beam deposition system

1991 ◽  
Vol 55 (1-4) ◽  
pp. 355-358 ◽  
Author(s):  
Osamu Tsukakoshi ◽  
Saburo Shimizu ◽  
Seiji Ogata ◽  
Naruyasu Sasaki ◽  
Hiroyuki Yamakawa
Keyword(s):  
Ion Beam ◽  
Low Energy ◽  
High Current ◽  
Ion Beam Deposition ◽  
Beam Deposition

Growth of Epitaxical SiC Layers onto on and off Axis 6H SiC Substrates by Ion Beam Deposition

1989 ◽  
Vol 162 ◽  
Author(s):  
K. L. More ◽  
S. P. Withrow ◽  
T. E. Haynes ◽  
R. A. Zuhr
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
High Resolution Electron Microscopy ◽  
Ion Beams ◽  
Deposition Technique ◽  
Crystalline Perfection ◽  
Ion Beam Deposition ◽  
Resolution Electron ◽  
Silicon Ions ◽  
Beam Deposition

ABSTRACTThin films of β SiC have been grown epitaxically onto on axis (0001) 6H α SiC substrates using ion beam deposition. The ion beam deposition technique involves the direct deposition of alternating layers of 13C+ and 30Si+. The carbon and silicon ions were obtained from an ion implanter by decelerating mass analyzed ion beams to 40 eV. The SiC substrate was held at ∼973 K. Thin films of α-SiC (a mixture of α- polytypes) were obtained following deposition onto off axis (∼2°) 6H α-SiC. High resolution electron microscopy and Rutherford backscattering techniques were used to determine the structure and crystalline perfection of the resulting layers.

MP-B5 facet passivation of (AlGa)As DH lasers by carbon ion-beam deposition

1978 ◽  
Vol 25 (11) ◽  
pp. 1343-1343
Author(s):  
T. Furuse ◽  
T. Suzuki ◽  
S. Matsumoto ◽  
K. Nishida ◽  
Y. Nannichi
Keyword(s):  
Ion Beam ◽  
Carbon Ion ◽  
Ion Beam Deposition ◽  
Carbon Ion Beam ◽  
Beam Deposition

Carbon transport in Si(001) and nucleation of diamond-like carbon layers during mass selected carbon ion beam deposition

1998 ◽  
Vol 7 (1) ◽  
pp. 15-22 ◽  
Author(s):  
S. Christiansen ◽  
M. Albrecht ◽  
G. Frank ◽  
H.P. Strunk ◽  
C. Ronning ◽  
...  
Keyword(s):  
Ion Beam ◽  
Diamond Like Carbon ◽  
Carbon Ion ◽  
Ion Beam Deposition ◽  
Carbon Ion Beam ◽  
Beam Deposition ◽  
Carbon Transport
Sign in / Sign up

Export Citation Format

Share Document