Extraction of molecular negative-ion beams of CN from radio frequency plasma-sputter-type heavy negative ion source for negative-ion beam deposition

1998 ◽  
Vol 69 (2) ◽  
pp. 884-886 ◽  
Author(s):  
Hiroshi Tsuji ◽  
Junzo Ishikawa ◽  
Tetsuo Tomita ◽  
Takaaki Yoshihara ◽  
Yasuhito Gotoh
Keyword(s):  
Radio Frequency ◽  
Ion Beam ◽  
Ion Beams ◽  
Ion Source ◽  
Negative Ion ◽  
Radio Frequency Plasma ◽  
Ion Beam Deposition ◽  
Frequency Plasma ◽  
Beam Deposition

Radio frequency plasma sputter type heavy negative ion source

Vacuum ◽  
1993 ◽  
Vol 44 (3-4) ◽  
pp. 203-207 ◽  
Author(s):  
Junzo Ishikawa ◽  
Hiroshi Tsuji ◽  
Yukio Okada ◽  
Masanobu Shinoda ◽  
Yasuhito Gotoh
Keyword(s):  
Radio Frequency ◽  
Ion Source ◽  
Negative Ion ◽  
Radio Frequency Plasma ◽  
Frequency Plasma

Formation of Thin Au Films Using Negative-Ion-Beam Deposition

1997 ◽  
Vol 160 (2) ◽  
pp. 591-597
Author(s):  
C. Heck ◽  
A. Chayahara ◽  
N. Tsubouchi ◽  
Y. Horino ◽  
K. Fujii ◽  
...  
Keyword(s):  
Ion Beam ◽  
Negative Ion ◽  
Ion Beam Deposition ◽  
Beam Deposition

Low‐energy (5

1995 ◽  
Vol 13 (6) ◽  
pp. 2836-2842 ◽  
Author(s):  
Y.‐W. Kim ◽  
I. Petrov ◽  
H. Ito ◽  
J. E. Greene
Keyword(s):  
Ion Beam ◽  
Ultrahigh Vacuum ◽  
Ion Source ◽  
Low Energy ◽  
High Brightness ◽  
Ion Beam Deposition ◽  
Beam Deposition

Composite Nanowires from Ion Beam Modification of Si Nanowires

1999 ◽  
Vol 581 ◽  
Author(s):  
X. T. Zhou ◽  
H. Y. Peng ◽  
N. G. Shang ◽  
N. Wang ◽  
I. Bello ◽  
...  
Keyword(s):  
Reaction Pathway ◽  
Ion Beam ◽  
Ion Source ◽  
Low Energy ◽  
Hydrogen Ions ◽  
Si Nanowires ◽  
Interacting Particles ◽  
Ion Beam Modification ◽  
Ion Beam Deposition ◽  
Beam Deposition

ABSTRACTComposite nanowires with typical diameters of 30-100nm, which consisted of Si, β-SiC, amorphous carbon were converted from Si nanowires by ion beam deposition. The Si nanorods were exposed to broad low energy ion beams. The low energy hydrocarbon, argon and hydrogen ions, generated in a Kaufman ion source, reacted with Si nanowires and formed the composite nanowires. It has been assumed that the reaction pathway to form the composite nanowires were driven by both thermal diffusion and kinetic energic of interacting particles.

scholarly journals Ion-Beam Deposition/Etching Using EMIM-N(CN)2 Ionic Liquid Ion Source

2015 ◽  
Vol 40 (2) ◽  
pp. 87-90 ◽  
Author(s):  
Mitsuaki Takeuchi ◽  
Yuki Hoshide ◽  
Takuya Hamaguchi ◽  
Hiromichi Ryuto ◽  
Gikan H. Takaoka
Keyword(s):  
Ionic Liquid ◽  
Ion Beam ◽  
Ion Source ◽  
Ion Beam Deposition ◽  
Beam Deposition
Sign in / Sign up

Export Citation Format

Share Document