Applications of Polysilicon Films in Microsensors and Microactuators

1987 ◽  
Vol 106 ◽  
Author(s):  
Roger T. Howe
Keyword(s):  
Thin Film ◽  
Electrical Properties ◽  
Young’S Modulus ◽  
Ultimate Strength ◽  
Residual Strain ◽  
Friction And Wear ◽  
Young's Modulus ◽  
Strain Gauges ◽  
Polysilicon Films ◽  
Micromechanical Structures

ABSTRACTThis paper reviews the applications of polysilicon in microsensor technology and in the emerging field of microfabricated actuators. Polysilicon is an attractive material for thin-film strain gauges, and is also used to fabricate micromechanical structures. The need for better understanding of the non-electrical properties of polysilicon, such as Young's modulus, residual strain, ultimate strength, friction, and wear, is emphasized.

scholarly journals Effect of Nanopores on Mechanical Properties of the Shape Memory Alloy

Micromachines ◽  
2021 ◽  
Vol 12 (5) ◽  
pp. 529
Author(s):  
Chunzhi Du ◽  
Zhifan Li ◽  
Bingfei Liu
Keyword(s):  
Mechanical Properties ◽  
Constitutive Model ◽  
Shape Memory ◽  
Young’S Modulus ◽  
Residual Strain ◽  
Surface Effect ◽  
Young's Modulus ◽  
Strain Curve ◽  
Stress Strain ◽  
Strength Limit

Nanoporous Shape Memory Alloys (SMA) are widely used in aerospace, military industry, medical and health and other fields. More and more attention has been paid to its mechanical properties. In particular, when the size of the pores is reduced to the nanometer level, the effect of the surface effect of the nanoporous material on the mechanical properties of the SMA will increase sharply, and the residual strain of the SMA material will change with the nanoporosity. In this work, the expression of Young’s modulus of nanopore SMA considering surface effects is first derived, which is a function of nanoporosity and nanopore size. Based on the obtained Young’s modulus, a constitutive model of nanoporous SMA considering residual strain is established. Then, the stress–strain curve of dense SMA based on the new constitutive model is drawn by numerical method. The results are in good agreement with the simulation results in the published literature. Finally, the stress-strain curves of SMA with different nanoporosities are drawn, and it is concluded that the Young’s modulus and strength limit decrease with the increase of nanoporosity.

Measurement of Young's Modulus and Poisson's Ratio of Thin Film by Combination of Bulge Test and Nano-Indentation

2008 ◽  
Vol 33-37 ◽  
pp. 969-974 ◽  
Author(s):  
Bong Bu Jung ◽  
Seong Hyun Ko ◽  
Hun Kee Lee ◽  
Hyun Chul Park
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Young’S Modulus ◽  
Poisson’S Ratio ◽  
Young's Modulus ◽  
Applied Pressure ◽  
Indentation Test ◽  
Poisson's Ratio ◽  
Bulge Test ◽  
Nano Indentation

This paper will discuss two different techniques to measure mechanical properties of thin film, bulge test and nano-indentation test. In the bulge test, uniform pressure applies to one side of thin film. Measurement of the membrane deflection as a function of the applied pressure allows one to determine the mechanical properties such as the elastic modulus and the residual stress. Nano-indentation measurements are accomplished by pushing the indenter tip into a sample and then withdrawing it, recording the force required as a function of position. . In this study, modified King’s model can be used to estimate the mechanical properties of the thin film in order to avoid the effect of substrates. Both techniques can be used to determine Young’s modulus or Poisson’s ratio, but in both cases knowledge of the other variables is needed. However, the mathematical relationship between the modulus and Poisson's ratio is different for the two experimental techniques. Hence, achieving agreement between the techniques means that the modulus and Poisson’s ratio and Young’s modulus of thin films can be determined with no a priori knowledge of either.

Determination of Mechanical Properties of Thin Film on Silicon Wafer

2003 ◽  
Author(s):  
Enboa Wu ◽  
Albert J. D. Yang ◽  
Ching-An Shao ◽  
C. S. Yen
Keyword(s):  
Thin Film ◽  
Mechanical Properties ◽  
Thermal Expansion ◽  
Young’S Modulus ◽  
Silicon Wafer ◽  
Coefficient Of Thermal Expansion ◽  
Young's Modulus ◽  
Poisson Ratio ◽  
Bulk State

Nondestructive determination of Young’s modulus, coefficient of thermal expansion, Poisson ratio, and thickness of a thin film has long been a difficult but important issue as the film of micrometer order thick might behave differently from that in the bulk state. In this paper, we have successfully demonstrated the capability of determining all these four parameters at one time. This novel method includes use of the digital phase-shifting reflection moire´ (DPRM) technique to record the slope of wafer warpage under temperature drop condition. In the experiment, 1-um thick aluminum was sputtered on a 6-in silicon wafer. The convolution relationship between the measured data and the mechanical properties was constructed numerically using the conventional 3D finite element code. The genetic algorithm (GA) was adopted as the searching tool for search of the optimal mechanical properties of the film. It was found that the determined data for Young’s modulus (E), Coefficient of Thermal Expansion (CTE), Poisson ratio (ν), and thickness (h) of the 1.00 um thick aluminum film were 104.2Gpa, 38.0 ppm/°C, 0.38, and 0.98 um, respectively, whereas that in the bulk state were measured to be E=71.4 Gpa, CTE=23.0 ppm/°C, and ν=0.34. The significantly larger values on the Young’s modulus and the coefficient of thermal expansion determined by this method might be attributed to the smaller dislocation density due to the thin dimension and formation of the 5-nm layer of Al2O3 formed on top of the 1-um thick sputtered film. The Young’s Modulus and the Poisson ratio of this nano-scale Al2O3 film were then determined. Their values are consistent with the physical intuition of the microstructure.

Differences between static and dynamic elastic moduli: Importance of experimental methods

2020 ◽  
Author(s):  
Elisabeth Bemer ◽  
Noalwenn Dubos-Sallée ◽  
Patrick N. J. Rasolofosaon
Keyword(s):  
Bulk Modulus ◽  
Young’S Modulus ◽  
Elastic Moduli ◽  
Young's Modulus ◽  
Local Strain ◽  
Experimental Methods ◽  
Triaxial Tests ◽  
Strain Gauges ◽  
Strain Measurements ◽  
Dynamic Elastic Moduli

<p>The differences between static and dynamic elastic moduli remain a controversial issue in rock physics. Various empirical correlations can be found in the literature. However, the experimental methods used to derive the static and dynamic elastic moduli differ and may entail substantial part of the discrepancies observed at the laboratory scale. The representativeness and bias of these methods should be fully assessed before applying big data analytics to the numerous datasets available in the literature.</p><p>We will illustrate, discuss and analyze the differences inherent to static and dynamic measurements through a series of triaxial and petroacoustic tests performed on an outcrop carbonate. The studied rock formation is Euville limestone, which is a crinoidal grainstone composed of roughly 99% calcite and coming from Meuse department located in Paris Basin. Sister plugs have been cored from the same quarry block and observed under CT-scanner to check their homogeneity levels.</p><p>The triaxial device is equipped with an internal stress sensor and provides axial strain measurements both from strain gauges glued to the samples and LVDTs placed inside the confinement chamber. Two measures of the static Young's modulus can thus be derived: the first one from the local strain measurements provided by the strain gauges and the second one from the semi-local strain measurements provided by the LVDTs. The P- and S-wave velocities are measured both through first break picking and the phase spectral ratio method, providing also two different measures of the dynamic Young's modulus.</p><p>The triaxial tests have been performed in drained conditions and the measured static elastic moduli correspond to drained elastic moduli. The petroacoustic tests have been performed using the fluid substitution method, which consists in measuring the acoustic velocities for various saturating fluids of different bulk modulus. No weakening or dispersion effects have been observed. Gassmann's equation can then be used to derive the dynamic drained elastic moduli and the solid matrix bulk modulus, which is otherwise either taken from the literature for pure calcite or dolomite samples, or computed using Voigt-Reuss-Hill or Hashin-Shtrikman averaging of the mineral constituents.</p><p>For the studied carbonate formation, we obtain similar values for static and dynamic elastic moduli when derived from careful lab experiments. Based on the obtained results, we will finally make recommendations, emphasizing the necessity of using relevant experimental techniques for a consistent characterization of the relation between static and dynamic elastic moduli.</p>

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