Effects of Surface and Bulk Defects in InP
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ABSTRACTUndoped, n-type InP has been studied utilizing Au-oxide- InP metal-insulator-semiconductor (MIS) structures. Processing variations have included oxide growth techniques, and annealing of grown oxides. Annealing of the devices in N2 or N2 :H2 after oxide formation has reduced reverse saturation current density by up to a factor of 10 and increased barrier height from 0.45 to 0.65 eV. Annealing of the oxide increases refractive index due possibly to a densification or changed chemical structure. ESCA data reveals thin native oxides to be InP04 whereas thermally grown ones also contain P2 05 and In2 03. DLTS data reveals a dominant defect 597 meV below the conduction band.
2012 ◽
Vol 106
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pp. 76-79
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2016 ◽
Vol 11
(4)
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pp. 939-942
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2012 ◽
Vol 2
(4)
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pp. 473-478
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2021 ◽
2013 ◽
Vol 652-654
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pp. 2239-2243
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