Passivation of N-Type Silicon by Hydrogen
Keyword(s):
ABSTRACTInfrared spectroscopy has been used to study hydrogen passivation of P, As, and Sb donors in Si. The spectra show several new absorption bands due to donor-H complexes. By comparing spectra after different heat treatments it is shown directly that the passivation is due to complex formation.
2018 ◽
Keyword(s):
1996 ◽
Vol 35
(Part 1, No. 7)
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pp. 3937-3941
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2009 ◽
Vol 11
(38)
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pp. 8417
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2007 ◽
Vol 15
(2)
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pp. 115-121
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