Aging Effects of As-deposited and Passivated Cobalt Slanted Columnar Thin Films

2012 ◽  
Vol 1409 ◽  
Author(s):  
Daniel Schmidt ◽  
Eva Schubert ◽  
Mathias Schubert
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Three Dimensional ◽  
Atomic Layer ◽  
Deposition Process ◽  
Visible Spectral Region ◽  
Metal Nanostructures ◽  
Aging Effects ◽  
Layer Deposition ◽  
Oxidation In Air

ABSTRACTAging effects of as-deposited and passivated slanted columnar thin films from cobalt determined by generalized ellipsometry within the visible spectral region are reported. Slanted columnar thin films have been grown by glancing angle electron beam deposition and sub-sequently coated with Al2O3 by an atomic layer deposition process. An anisotropic Bruggeman effective medium approximation developed for highly ordered three dimensional metal nanostructures is employed to analyze spectroscopic Mueller matrix ellipsometry data. Our model approach allows for determination of biaxial optical and structural properties as well as fractions of multiple film constituents. While the optical properties of the uncoated film change over time, the alumina passivation layer prevents oxidation in air and therefore aging effects; however, it affects the intrinsic bulk-like Co optical properties.

scholarly journals Atomic Layer Deposition of Superconducting CuO Thin Films on Three-Dimensional Substrates

Crystals ◽  
2020 ◽  
Vol 10 (8) ◽  
pp. 650
Author(s):  
Aile Tamm ◽  
Aivar Tarre ◽  
Valeriy Verchenko ◽  
Helina Seemen ◽  
Raivo Stern
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Ion Beam ◽  
Three Dimensional ◽  
Atomic Layer ◽  
Deposition Process ◽  
Critical Temperatures ◽  
Organic Precursor ◽  
X Ray ◽  
Layer Deposition

In previous decades, investigation of superconductors was aimed either at finding materials with higher critical temperatures or at discovering nontypical superconducting behavior. Here, we present the cupric (CuO) thin films, which were synthesized by atomic layer deposition by using a metal-organic precursor, copper (II)-bis-(-dimethylamino-2-propoxide), and ozone as an oxidizer. The deposition process was optimized by employing a quartz crystal monitoring, and the contact between the deposited films and planar and three-dimensional SiO2/Si substrates was examined by scanning electron microscopy with a focused ion beam module. Phase and elemental composition were analyzed by X-ray diffraction and X-ray fluorescence. Two-probe electrical resistivity measurements revealed a resistivity drop below the critical temperature of 4 K, which may indicate low-temperature superconductivity of the CuO thin films.

scholarly journals W:Al2O3 Nanocomposite Thin Films with Tunable Optical Properties Prepared by Atomic Layer Deposition

2016 ◽  
Vol 120 (27) ◽  
pp. 14681-14689 ◽  
Author(s):  
Shaista Babar ◽  
Anil U. Mane ◽  
Angel Yanguas-Gil ◽  
Elham Mohimi ◽  
Richard T. Haasch ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Nanocomposite Thin Films ◽  
Tunable Optical Properties

Optical properties of crystalline Al203 thin films grown by atomic layer deposition

2005 ◽  
Author(s):  
Jaan Aarik ◽  
Aarne Kasikov ◽  
Marco Kirm ◽  
Sven Lange ◽  
Teet Uustare ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Optical Properties of Ta2O5 Thin Films Fabricated by Atomic Layer Deposition

2011 ◽  
Vol 31 (10) ◽  
pp. 1031001
Author(s):  
范欢欢 Fan Huanhuan ◽  
章岳光 Zhang Yueguang ◽  
沈伟东 Shen Weidong ◽  
李旸晖 Li Yanghui ◽  
李承帅 Li Chengshuai ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Layer Deposition

Al 2 O 3 Thin Films Prepared by a Combined Thermal‐Plasma Atomic Layer Deposition Process at Low Temperature for Encapsulation Applications

2019 ◽  
Vol 217 (8) ◽  
pp. 1900237
Author(s):  
Zhen Zhu ◽  
Saoussen Merdes ◽  
Oili M. E. Ylivaara ◽  
Kenichiro Mizohata ◽  
Mikko J. Heikkilä ◽  
...  
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Atomic Layer Deposition ◽  
Thermal Plasma ◽  
Atomic Layer ◽  
Deposition Process ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

Growth morphology and electrical/optical properties of Al-doped ZnO thin films grown by atomic layer deposition

2012 ◽  
Vol 30 (2) ◽  
pp. 021202 ◽  
Author(s):  
Tara Dhakal ◽  
Daniel Vanhart ◽  
Rachel Christian ◽  
Abhishek Nandur ◽  
Anju Sharma ◽  
...  
Keyword(s):  
Thin Films ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Zno Thin Films ◽  
Growth Morphology ◽  
Layer Deposition ◽  
Doped Zno

scholarly journals Atomic Layer Deposition of Inorganic Thin Films on 3D Polymer Nanonetworks

2019 ◽  
Vol 9 (10) ◽  
pp. 1990 ◽  
Author(s):  
Jinseong Ahn ◽  
Changui Ahn ◽  
Seokwoo Jeon ◽  
Junyong Park
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
Interference Lithography ◽  
Technical Requirement ◽  
Layer Deposition ◽  
Direct Laser ◽  
Inorganic Thin Films ◽  
Polymer Template

Atomic layer deposition (ALD) is a unique tool for conformally depositing inorganic thin films with precisely controlled thickness at nanoscale. Recently, ALD has been used in the manufacture of inorganic thin films using a three-dimensional (3D) nanonetwork structure made of polymer as a template, which is pre-formed by advanced 3D nanofabrication techniques such as electrospinning, block-copolymer (BCP) lithography, direct laser writing (DLW), multibeam interference lithography (MBIL), and phase-mask interference lithography (PMIL). The key technical requirement of this polymer template-assisted ALD is to perform the deposition process at a lower temperature, preserving the nanostructure of the polymer template during the deposition process. This review focuses on the successful cases of conformal deposition of inorganic thin films on 3D polymer nanonetworks using thermal ALD or plasma-enhanced ALD at temperatures below 200 °C. Recent applications and prospects of nanostructured polymer–inorganic composites or hollow inorganic materials are also discussed.

Sign in / Sign up

Export Citation Format

Share Document