Influence of substrate bias voltage on structure and properties of DC magnetron sputtered Ni–Zr alloy thin films

2020 ◽  
Vol 35 (12) ◽  
pp. 1543-1555 ◽  
Author(s):  
Bibhu Prasad Sahu ◽  
Amlan Dutta ◽  
Rahul Mitra
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Substrate Bias ◽  
Structure And Properties ◽  
Substrate Bias Voltage ◽  
Influence Of Substrate ◽  
Image Position ◽  
Zr Alloy

Abstract

Influence of substrate bias voltage on the properties of sputtered nickel oxide thin films

2012 ◽  
Author(s):  
A. Mallikarjuna Reddy ◽  
Ch. Seshendra Reddy ◽  
Y. Ashok Kumar Reddy ◽  
R. Lydia ◽  
P. Sreedhara Reddy ◽  
...  
Keyword(s):  
Thin Films ◽  
Nickel Oxide ◽  
Bias Voltage ◽  
Substrate Bias ◽  
Oxide Thin Films ◽  
Substrate Bias Voltage ◽  
Influence Of Substrate ◽  
Nickel Oxide Thin Films

Influence of substrate bias voltage on properties of Pt thin films deposited by non-mass separated ion beam deposition method

2009 ◽  
Vol 63 (26) ◽  
pp. 2181-2184 ◽  
Author(s):  
Joon Woo Bae ◽  
Jae-Won Lim ◽  
Kouji Mimura ◽  
Masahito Uchikoshi ◽  
Mitsuhiro Wada ◽  
...  
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Deposition Method ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Influence Of Substrate ◽  
Beam Deposition

scholarly journals Influence of Substrate Bias Voltage on the Properties of Cu Thin Films by Sputter Type Ion Beam Deposition

2002 ◽  
Vol 43 (6) ◽  
pp. 1403-1408 ◽  
Author(s):  
Jae-Won Lim ◽  
Yukio Ishikawa ◽  
Kiyoshi Miyake ◽  
Mutsuo Yamashita ◽  
Minoru Isshiki
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Influence Of Substrate ◽  
Beam Deposition
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