Effect of substrate bias voltage on the texture and microstructure of Cu thin films deposited by ion beam deposition

2003 ◽  
Vol 9 (2) ◽  
pp. 201-205 ◽  
Author(s):  
Jae -Won Lim ◽  
Minoru Isshiki
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Beam Deposition

Influence of substrate bias voltage on properties of Pt thin films deposited by non-mass separated ion beam deposition method

2009 ◽  
Vol 63 (26) ◽  
pp. 2181-2184 ◽  
Author(s):  
Joon Woo Bae ◽  
Jae-Won Lim ◽  
Kouji Mimura ◽  
Masahito Uchikoshi ◽  
Mitsuhiro Wada ◽  
...  
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Deposition Method ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Influence Of Substrate ◽  
Beam Deposition

scholarly journals Influence of Substrate Bias Voltage on the Properties of Cu Thin Films by Sputter Type Ion Beam Deposition

2002 ◽  
Vol 43 (6) ◽  
pp. 1403-1408 ◽  
Author(s):  
Jae-Won Lim ◽  
Yukio Ishikawa ◽  
Kiyoshi Miyake ◽  
Mutsuo Yamashita ◽  
Minoru Isshiki
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Influence Of Substrate ◽  
Beam Deposition

Effect of substrate bias voltage on the purity of Cu films deposited by non-mass separated ion beam deposition

2003 ◽  
Vol 434 (1-2) ◽  
pp. 30-33 ◽  
Author(s):  
J.-W. Lim ◽  
K. Mimura ◽  
K. Miyake ◽  
M. Yamashita ◽  
M. Isshiki
Keyword(s):  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Cu Films ◽  
Ion Beam Deposition ◽  
Beam Deposition

Effect of Substrate Bias Voltage on the Thermal Stability of Cu/Ta/Si Structures Deposited by Ion Beam Deposition

2003 ◽  
Vol 42 (Part 1, No. 5A) ◽  
pp. 2780-2785 ◽  
Author(s):  
Jae-Won Lim ◽  
Kouji Mimura ◽  
Kiyoshi Miyake ◽  
Mutsuo Yamashita ◽  
Minoru Isshiki
Keyword(s):  
Thermal Stability ◽  
Bias Voltage ◽  
Ion Beam ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Ion Beam Deposition ◽  
Thermal Stability Of ◽  
Beam Deposition

Electron energy loss spectroscopy of diamond-like carbon thin films

1992 ◽  
Vol 50 (2) ◽  
pp. 1272-1273
Author(s):  
J. Kulik ◽  
Y. Lifshitz ◽  
G.D. Lempert ◽  
S. Rotter ◽  
J.W. Rabalais ◽  
...  
Keyword(s):  
Thin Films ◽  
Energy Loss ◽  
Electron Energy ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Ion Beam Deposition ◽  
Chemistry Research ◽  
Carbon Thin Films ◽  
Electron Energy Loss ◽  
Beam Deposition

Carbon thin films with diamond-like properties have generated significant interest in condensed matter science in recent years. Their extreme hardness combined with insulating electronic characteristics and high thermal conductivity make them attractive for a variety of uses including abrasion resistant coatings and applications in electronic devices. Understanding the growth and structure of such films is therefore of technological interest as well as a goal of basic physics and chemistry research. Recent investigations have demonstrated the usefulness of energetic ion beam deposition in the preparation of such films. We have begun an electron microscopy investigation into the microstructure and electron energy loss spectra of diamond like carbon thin films prepared by energetic ion beam deposition.The carbon films were deposited using the MEIRA ion beam facility at the Soreq Nuclear Research Center in Yavne, Israel. Mass selected C+ beams in the range 50 to 300 eV were directed onto Si {100} which had been etched with HF prior to deposition.

Charge Assisted Deposition of Polycrystalline Silicon Thin Films by Cesium Sputter Ion Beam Deposition

2004 ◽  
Vol 43 (10) ◽  
pp. 6880-6883 ◽  
Author(s):  
Deuk Yeon Lee ◽  
Yong Hwan Kim ◽  
In Kyo Kim ◽  
Dong Joon Choi ◽  
Soon Moon Jeong ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Ion Beam ◽  
Ion Beam Deposition ◽  
Silicon Thin Films ◽  
Beam Deposition
Sign in / Sign up

Export Citation Format

Share Document