Plasma enhanced atomic layer deposition of Al2O3gate dielectric thin films on AlGaN/GaN substrates: The role of surface predeposition treatments

2017 ◽  
Vol 35 (1) ◽  
pp. 01B140 ◽  
Author(s):  
Emanuela Schilirò ◽  
Patrick Fiorenza ◽  
Giuseppe Greco ◽  
Fabrizio Roccaforte ◽  
Raffaella Lo Nigro
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Thin Films ◽  
Layer Deposition

scholarly journals Role of oligomer structures in the surface chemistry of amidinate metal complexes used for atomic layer deposition of thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 720-731 ◽  
Author(s):  
Jonathan Guerrero-Sánchez ◽  
Bo Chen ◽  
Noboru Takeuchi ◽  
Francisco Zaera
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Surface Chemistry ◽  
Metal Complexes ◽  
Atomic Layer ◽  
Layer Deposition ◽  
Image Position

Abstract

Effects of surface nature of different semiconductor substrates on the plasma enhanced atomic layer deposition growth of Al2O3gate dielectric thin films

2015 ◽  
Vol 12 (7) ◽  
pp. 980-984 ◽  
Author(s):  
Emanuela Schilirò ◽  
Giuseppe Greco ◽  
Patrick Fiorenza ◽  
Cristina Tudisco ◽  
Guglielmo Guido Condorelli ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Thin Films ◽  
Layer Deposition ◽  
Semiconductor Substrates ◽  
Surface Nature

Electrical properties of Ga2O3-based dielectric thin films prepared by plasma enhanced atomic layer deposition (PEALD)

2006 ◽  
Vol 17 (2-4) ◽  
pp. 145-149 ◽  
Author(s):  
G. X. Liu ◽  
F. K. Shan ◽  
J. J. Park ◽  
W. J. Lee ◽  
G. H. Lee ◽  
...  
Keyword(s):  
Thin Films ◽  
Electrical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Dielectric Thin Films ◽  
Layer Deposition

Atomic Layer Deposition on Polymer Thin Films: On the Role of Precursor Infiltration and Reactivity

2021 ◽  
Author(s):  
Robin R. Petit ◽  
Jin Li ◽  
Babs Van de Voorde ◽  
Sandra Van Vlierberghe ◽  
Philippe F. Smet ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Polymer Thin Films ◽  
Atomic Layer ◽  
Layer Deposition
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