Effect of growth temperature on the key properties of aluminum-doped zinc oxide thin films prepared by atomic layer deposition

2019 ◽  
Vol 9 (3) ◽  
pp. 1105-1110 ◽  
Author(s):  
Emine Güneri ◽  
Bethanie Stadler
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Growth Temperature ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Aluminum Doped Zinc Oxide ◽  
Image Position

Abstract

scholarly journals Atomic layer deposition of zirconium oxide thin films

2019 ◽  
Vol 35 (7) ◽  
pp. 804-812
Author(s):  
Xin Wang ◽  
Sujan Kumar Ghosh ◽  
Mahyar Afshar-Mohajer ◽  
Hua Zhou ◽  
Yongqiang Liu ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Layer Deposition ◽  
Zirconium Oxide ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition ◽  
Image Position

Abstract

Spatial Atomic Layer Deposition of Zinc Oxide Thin Films

2011 ◽  
Vol 4 (1) ◽  
pp. 268-272 ◽  
Author(s):  
A. Illiberi ◽  
F. Roozeboom ◽  
P. Poodt
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Broadband optical properties of aluminium zinc oxide thin films prepared by spatial atomic layer deposition

2018 ◽  
Vol 653 ◽  
pp. 267-273 ◽  
Author(s):  
Daniel B. Fullager ◽  
Glenn D. Boreman ◽  
Carolyn D. Ellinger ◽  
Tino Hofmann
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Optical Properties ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

Transparent and conductive undoped zinc oxide thin films grown by atomic layer deposition

2010 ◽  
Vol 207 (7) ◽  
pp. 1568-1571 ◽  
Author(s):  
Grzegorz Luka ◽  
Tomasz Krajewski ◽  
Lukasz Wachnicki ◽  
Bartlomiej Witkowski ◽  
Elzbieta Lusakowska ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

1,5-Pentanediol as an Oxygen Precursor for Atomic Layer Deposition of Zinc Oxide Thin Films

2017 ◽  
Vol 29 (8) ◽  
pp. 3371-3374
Author(s):  
Seung-Joo Han ◽  
Seokhee Shin ◽  
Sungjoon Kim ◽  
Dong-Hyun Ko ◽  
Zhenyu Jin ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition

scholarly journals Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

2020 ◽  
Vol 217 (21) ◽  
pp. 2000319
Author(s):  
Taher Abu Ali ◽  
Julian Pilz ◽  
Philipp Schäffner ◽  
Markus Kratzer ◽  
Christian Teichert ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Atomic Layer Deposition ◽  
Piezoelectric Properties ◽  
Atomic Layer ◽  
Oxide Thin Films ◽  
Layer Deposition
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