scholarly journals Phase transformations in nanocomposite ZrAlN thin films during annealing

2012 ◽  
Vol 27 (13) ◽  
pp. 1716-1724 ◽  
Author(s):  
Lina Rogström ◽  
Mats Ahlgren ◽  
Jonathan Almer ◽  
Lars Hultman ◽  
Magnus Odén

Abstract

Author(s):  
K. Barmak

Generally, processing of thin films involves several annealing steps in addition to the deposition step. During the annealing steps, diffusion, transformations and reactions take place. In this paper, examples of the use of TEM and AEM for ex situ and in situ studies of reactions and phase transformations in thin films will be presented.The ex situ studies were carried out on Nb/Al multilayer thin films annealed to different stages of reaction. Figure 1 shows a multilayer with dNb = 383 and dAl = 117 nm annealed at 750°C for 4 hours. As can be seen in the micrograph, there are four phases, Nb/Nb3-xAl/Nb2-xAl/NbAl3, present in the film at this stage of the reaction. The composition of each of the four regions marked 1-4 was obtained by EDX analysis. The absolute concentration in each region could not be determined due to the lack of thickness and geometry parameters that were required to make the necessary absorption and fluorescence corrections.


2018 ◽  
Vol 33 (24) ◽  
pp. 4165-4172 ◽  
Author(s):  
Deepak Kumar ◽  
Prasanta Mandal ◽  
Anil Singh ◽  
Charu Pant ◽  
Sudesh Sharma

Abstract


2016 ◽  
Vol 31 (8) ◽  
pp. 1018-1026 ◽  
Author(s):  
David T. Harris ◽  
Matthew J. Burch ◽  
Edward J. Mily ◽  
Elizabeth C. Dickey ◽  
Jon-Paul Maria

Abstract


2011 ◽  
Vol 26 (14) ◽  
pp. 1696-1701 ◽  
Author(s):  
Yaohua Zhu ◽  
Suet To ◽  
Xianming Liu ◽  
Guoliang Hu ◽  
Qing Xu

Abstract


MRS Bulletin ◽  
2018 ◽  
Vol 43 (6) ◽  
pp. 413-418 ◽  
Author(s):  
Qingyang Du ◽  
Takian Fakhrul ◽  
Yan Zhang ◽  
Juejun Hu ◽  
Caroline A. Ross

Abstract


2019 ◽  
Vol 35 (7) ◽  
pp. 720-731 ◽  
Author(s):  
Jonathan Guerrero-Sánchez ◽  
Bo Chen ◽  
Noboru Takeuchi ◽  
Francisco Zaera

Abstract


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