AlN Etching under ICP Cl2/BCl3/Ar Plasma Mixture: Experimental Characterization and Plasma Kinetic Model

MRS Advances ◽  
2019 ◽  
Vol 4 (27) ◽  
pp. 1579-1587
Author(s):  
Mohammad Rammal ◽  
Ahmed Rhallabi ◽  
Delphine Néel ◽  
Dalila Make ◽  
Alexandre Shen ◽  
...  
Keyword(s):  
Electron Density ◽  
Density Ratio ◽  
Flux Ratio ◽  
Laser Cavity ◽  
Low Pressure ◽  
Negative Ion ◽  
Ion Density ◽  
Dc Bias ◽  
Ar Plasma ◽  
Atomic Chlorine

AbstractAlN etching with chloride plasmas is studied. The experimental results show that the etching of AlN under a low pressure Cl2/Ar plasma mixture in moderate DC bias is not possible. The addition of BCl3 gas to Cl2/Ar mixture allows the etching of AlN materials. However the obtained properties of etched AlN is still not in conformity with the technological specification especially for the condition which the etched AlN must be kept only along the sidewall of the InP laser cavity and be removed elsewhere (selective etching). To know more about the effect of the BCl3 addition to the Cl2/Ar plasma mixture, global model of BCl3/Cl2/Ar is developed to quantify the neutral and ion densities as well as the electron density and temperature. The simulation results show that the electron density and low pressure linearly varies with the RF power. The negative ion density decreases with the percentage of BCl3 leading to the diminution of the electronegativity which is represented by negative ion to electron density ratio. The simulation shows that the positive ion to atomic chlorine flux ratio increases with the %BCl3. Such parameters could play an important role in the ion neutral synergy during the etching process.

Measurements of the negative ion density in SF6/Ar plasma using a plane electrostatic probe

2001 ◽  
Vol 72 (5) ◽  
pp. 2288-2293 ◽  
Author(s):  
Masako Shindo ◽  
Satoshi Uchino ◽  
Ryuta Ichiki ◽  
Shinji Yoshimura ◽  
Yoshinobu Kawai
Keyword(s):  
Negative Ion ◽  
Ion Density ◽  
Electrostatic Probe ◽  
Ar Plasma

Nonlinear dynamics of ion acoustic waves in quantum pair-ion plasmas

2015 ◽  
Vol 81 (5) ◽  
Author(s):  
Biswajit Sahu ◽  
Barnali Pal ◽  
Swarup Poria ◽  
Rajkumar Roychoudhury
Keyword(s):  
Mach Number ◽  
Acoustic Waves ◽  
Density Ratio ◽  
Negative Ions ◽  
Negative Ion ◽  
Quantum Plasma ◽  
Ion Acoustic Waves ◽  
Ion Density ◽  
Quantum Parameter ◽  
Ion Acoustic

The nonlinear properties of the ion acoustic waves (IAWs) in a three-component quantum plasma comprising electrons, and positive and negative ions are investigated analytically and numerically by employing the quantum hydrodynamic (QHD) model. The Sagdeev pseudopotential technique is applied to obtain the small-amplitude soliton solution. The effects of the quantum parameter$H$, positive to negative ion density ratio${\it\beta}$and Mach number on the nonlinear structures are investigated. It is found that these factors can significantly modify the properties of the IAWs. The existence of quasi-periodic and chaotic oscillations in the system is established. Switching from quasi-periodic to chaotic is possible with the variation of Mach number or quantum parameter$H$.

scholarly journals Pulsed DC bias for the study of negative-ion production on surfaces of insulating materials in low pressure hydrogen plasmas

2019 ◽  
Vol 125 (3) ◽  
pp. 033303 ◽  
Author(s):  
K. Achkasov ◽  
R. Moussaoui ◽  
D. Kogut ◽  
E. Garabedian ◽  
J. M. Layet ◽  
...  
Keyword(s):  
Low Pressure ◽  
Negative Ion ◽  
Insulating Materials ◽  
Hydrogen Plasmas ◽  
Pulsed Dc ◽  
Ion Production ◽  
Dc Bias ◽  
Pressure Hydrogen

scholarly journals Electrostatic wave breaking limit in a cold electronegative plasma with non-Maxwellian electrons

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
I. S. Elkamash ◽  
I. Kourakis
Keyword(s):  
Wave Breaking ◽  
Density Ratio ◽  
Negative Ions ◽  
First Integral ◽  
Energy Balance Equation ◽  
Plasma Parameters ◽  
Ion Density ◽  
Electrostatic Wave ◽  
Nonthermal Electrons ◽  
Electronegative Plasma

AbstractA one-dimensional multifluid hydrodynamic model has been adopted as basis for an investigation of the role of suprathermal electrons on the wave breaking amplitude limit for electrostatic excitations propagating in an electronegative plasma. A three-component plasma is considered, consisting of two inertial cold ion populations of opposite signs, evolving against a uniform background of (non-Maxwellian) electrons. A kappa-type (non-Maxwellian) distribution function is adopted for the electrons. By employing a traveling wave approximation, the first integral for the fluid-dynamical system has been derived, in the form of a pseudo-energy balance equation, and analyzed. The effect of intrinsic plasma parameters (namely the ion density ratio, the ion mass ratio, and the superthermal index of the nonthermal electrons) on the wave breaking amplitude limit is explored, by analyzing the phase space topology of the associated pseudopotential function. Our results are relevant to particle acceleration in Space environments and to recent experiments based on plasma-based accelerator schemes, where the simultaneous presence of negative ions and nonthermal electrons may be observed.

Positive Corona and Atmospheric Negative Ion Density under Repetitive Impulse Conditions

1987 ◽  
Vol IA-23 (6) ◽  
pp. 990-994 ◽  
Author(s):  
Norman L. Allen ◽  
Gerard Berger ◽  
Derek Dring
Keyword(s):  
Negative Ion ◽  
Ion Density

Electron density in low‐pressure Na‐Ne discharges deduced from laser absorption experiments

1986 ◽  
Vol 59 (7) ◽  
pp. 2324-2331 ◽  
Author(s):  
H. J. Cornelissen ◽  
H. J. H. Merks‐Eppingbroek
Keyword(s):  
Electron Density ◽  
Low Pressure ◽  
Laser Absorption

scholarly journals ELECTRON DENSITY STUDIES ON THE REGIOSELECTIVITY OF DEPROTONATION REACTIONS

2014 ◽  
Vol 70 (a1) ◽  
pp. C287-C287
Author(s):  
Juan Van der Maelen ◽  
Javier Cabeza
Keyword(s):  
Electron Density ◽  
Theoretical Calculations ◽  
Density Ratio ◽  
Atomic Charge ◽  
Heterocyclic Ring ◽  
Bond Critical Point ◽  
Electron Densities ◽  
Total Energy Density ◽  
Topological Parameters ◽  
Alkyl Groups

The C-alkyl groups of cationic triruthenium cluster complexes of the type [Ru3(µ-H)(µ-κ2N1,C2-EtnMemPyHk)(CO)10]+ (EtnMemPyHk represents a generic C-alkyl-N-methyl-pyrazium species) have been deprotonated to give kinetic products that contain unprecedented C-alkylidene derivatives and maintain the original edge-bridged decacarbonyl structure. When the starting complexes contain various C-alkyl groups, the selectivity of these deprotonation reactions is related to the atomic charges of the alkyl H atoms, as suggested by DFT/natural-bond orbital (NBO) calculations. Three additional electronic properties of the C-alkyl C-H bonds have also been found to correlate with the experimental regioselectivity since, in all cases, the deprotonated C-H bond has the smallest electron density at the bond critical point (bcp), the greatest Laplacian of the electron density at the bcp, and the greatest total energy density ratio at the bcp (computed by using the quantum theory of atoms in molecules, QTAIM). The kinetic decacarbonyl products evolve, under appropriate reaction conditions that depend upon the position of the C-alkylidene group in the heterocyclic ring, towards face-capped nonacarbonyl derivatives (thermodynamic products). Theoretical calculations support the proposal that the selectivity of these deprotonation reactions is primarily determined by the atomic charge of the alkyl H atoms: the higher the charge the easier the deprotonation when the starting complexes contain various C-alkyl groups. On the other hand, although QTAIM results have been obtained here only from theoretical electron densities for the above clusters, comparisons with local and integral topological parameters derived from both experimental and theoretical electron densities for the related triruthenium complex [Ru3(μ-H)2(μ3-MeImCH)(CO)9] (Me2Im = 1,3-dimethylimidazol-2-ylidene) may easily be made.

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