Electron density in low‐pressure Na‐Ne discharges deduced from laser absorption experiments

1986 ◽  
Vol 59 (7) ◽  
pp. 2324-2331 ◽  
Author(s):  
H. J. Cornelissen ◽  
H. J. H. Merks‐Eppingbroek
Keyword(s):  
Electron Density ◽  
Low Pressure ◽  
Laser Absorption

scholarly journals Diagnostics of low-pressure capacitively coupled RF discharge argon plasma

2019 ◽  
Vol 13 (27) ◽  
pp. 76-82
Author(s):  
Kadhim A. Aadim
Keyword(s):  
Electron Temperature ◽  
Electron Density ◽  
Langmuir Probe ◽  
Gas Flow ◽  
Low Pressure ◽  
Gas Pressure ◽  
Rf Discharge ◽  
Electrode Gap ◽  
Probe Characteristic ◽  
Capacitively Coupled

Low-pressure capacitively coupled RF discharge Ar plasma has been studied using Langmuir probe. The electron temperature, electron density and Debay length were calculated under different pressures and electrode gap. In this work the RF Langmuir probe is designed using 4MHz filter as compensation circuit and I-V probe characteristic have been investigated. The pressure varied from 0.07 mbar to 0.1 mbar while electrode gap varied from 2-5 cm. The plasma was generated using power supply at 4MHz frequency with power 300 W. The flowmeter is used to control Argon gas flow in the range of 600 standard cubic centimeters per minute (sccm). The electron temperature drops slowly with pressure and it's gradually decreased when expanding the electrode gap. As the gas pressure increases, the plasma density rises slightly at low gas pressure while it drops little at higher gas pressure. The electron density decreases rapidly with expand distances between electrodes.

Two-resonance probe for measuring electron density in low-pressure plasmas

2017 ◽  
Vol 26 (4) ◽  
pp. 045015
Author(s):  
D W Kim ◽  
S J You ◽  
S J Kim ◽  
J H Kim ◽  
W Y Oh
Keyword(s):  
Electron Density ◽  
Low Pressure

PI Controller for Electron Density Control in Low Pressure Plasma

2012 ◽  
Vol 45 (3) ◽  
pp. 341-345
Author(s):  
Y. Zhang ◽  
B. Keville ◽  
C. Gaman ◽  
A. Holohan ◽  
S. Daniels
Keyword(s):  
Electron Density ◽  
Low Pressure ◽  
Pi Controller ◽  
Pressure Plasma ◽  
Density Control ◽  
Low Pressure Plasma
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