Review: Station to Station By Doug Aitken

2016 ◽  
Vol 43 (5) ◽  
pp. 32-33
Author(s):  
Suzanne E. Szucs
Keyword(s):  
Review Station

Study of Defect Generated During Cu/Black Diamond CMP Process

2002 ◽  
Vol 732 ◽  
Author(s):  
Shaoyu Wu ◽  
Ning Li ◽  
J. M. Kang ◽  
T. W. M. Lam ◽  
B. Lin ◽  
...  
Keyword(s):  
Film Surface ◽  
Wafer Inspection ◽  
Patterned Wafers ◽  
Inspection Systems ◽  
Low K ◽  
Review Station

AbstractBlack Diamond (BD) is gaining popularity as a low k dielectric for copper/low k integration. However, because of lower hardness and more hydrophobic in nature of BD film surface comparing with those of the conventional oxide, some specific defects appear during CMP process of Cu/BD patterned wafers. In this study, the patterned wafer inspection systems, AIT II, and SEM review station are used to review and to classify such defects generated from CMP process. Using conventional Cu/Oxide CMP process, the percentage of these specific defects from Cu/BD CMP is typically more than 60 of total defect count. By modifying the composition of slurry with new additives and optimization of polishing and cleaning parameters, the total defect count can be reduced by 80%, in which the amount of specific defects is less than 5% of total defect count.

Multimodality cardiac image review station using dynamic decompression of JPEG images

1995 ◽  
Author(s):  
Laurence A. Spero ◽  
Bennett R. Groshong ◽  
Brian P. Harrawood ◽  
Thomas M. Bashore ◽  
Jack T. Cusma
Keyword(s):  
Jpeg Images ◽  
Cardiac Image ◽  
Review Station

A low cost DICOM review station for cardiac surgery

2002 ◽  
Author(s):  
M.G. Gerritsen ◽  
W.A. Dijk ◽  
T.W. Waterbolk ◽  
P.H. Mook ◽  
W. van der Velde ◽  
...  
Keyword(s):  
Cardiac Surgery ◽  
Low Cost ◽  
Review Station

Evolution of the clinical review station for enterprise-wide multimedia radiology reporting

2000 ◽  
Author(s):  
William B. Hanlon ◽  
Vladimir I. Valtchinov ◽  
Scott D. Davis ◽  
James Lester ◽  
Ramin Khorasani ◽  
...  
Keyword(s):  
Clinical Review ◽  
Radiology Reporting ◽  
Review Station
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