Ultra-Thin Film Dielectric Reliability Characterization

Author(s):  
JS Suehle
2020 ◽  
Vol 140 (4) ◽  
pp. 92-96
Author(s):  
Yuto Goda ◽  
Hiroto Shobu ◽  
Kenji Sakai ◽  
Toshihiko Kiwa ◽  
Kenji Kondo ◽  
...  

Author(s):  
Ying-Ching Shih ◽  
Tzu-Ying Kuo ◽  
Yin-Po Hung ◽  
Jing-Yao Chang ◽  
Chih-Yuan Cheng ◽  
...  
Keyword(s):  

2009 ◽  
Vol 24 (9) ◽  
pp. 2935-2938 ◽  
Author(s):  
P. Stoliar ◽  
E. Bystrenova ◽  
S.D. Quiroga ◽  
P. Annibale ◽  
M. Facchini ◽  
...  

2016 ◽  
Vol 176 ◽  
pp. 232-236 ◽  
Author(s):  
Kamrul Hassan ◽  
A.S.M. Iftekhar Uddin ◽  
Farman Ullah ◽  
Yong Soo Kim ◽  
Gwiy-Sang Chung

RSC Advances ◽  
2017 ◽  
Vol 7 (62) ◽  
pp. 39147-39152 ◽  
Author(s):  
K. N. Woods ◽  
E. C. Waddington ◽  
C. A. Crump ◽  
E. A. Bryan ◽  
T. S. Gleckler ◽  
...  

An all-inorganic, aqueous solution route enables facile control of composition and optimization of zirconium aluminum oxide thin film dielectric properties.


2002 ◽  
Vol 101 (4) ◽  
pp. 149-153
Author(s):  
J. M. Gregg ◽  
M. H. Corbett ◽  
D. O'Neill ◽  
G. Catalan ◽  
R. M. Bowman
Keyword(s):  

Sign in / Sign up

Export Citation Format

Share Document