Tunable high-κ ZrxAl1−xOy thin film dielectrics from all-inorganic aqueous precursor solutions
Keyword(s):
An all-inorganic, aqueous solution route enables facile control of composition and optimization of zirconium aluminum oxide thin film dielectric properties.
2015 ◽
Vol 7
(3)
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pp. 1678-1684
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2015 ◽
Vol 3
(13)
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pp. 3114-3120
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2017 ◽
Vol 9
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pp. 10897-10903
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2010 ◽
Vol 54
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pp. 95-98
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2018 ◽
Vol 3
(2)
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pp. 025005
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2007 ◽
Vol 20
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pp. 859-863
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pp. 1585-1588
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2006 ◽
Vol 45
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pp. 679-684
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2011 ◽
Vol 50
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pp. 070201
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