Gate Oxide Reliability Assessment and Some Connections to Oxide Integrity

Author(s):  
DJ Dumin
Author(s):  
Thomas Santini ◽  
Morand Sebastien ◽  
Miller Florent ◽  
Luong-Viet Phung ◽  
Bruno Allard

2002 ◽  
Vol 42 (9-11) ◽  
pp. 1505-1508
Author(s):  
F. Monsieur ◽  
E. Vincent ◽  
D. Roy ◽  
S. Bruyère ◽  
G. Pananakakis ◽  
...  

2016 ◽  
Vol 858 ◽  
pp. 433-436
Author(s):  
Keiichi Yamada ◽  
Junji Senzaki ◽  
Kazutoshi Kojima ◽  
Hajime Okumura

The new indicators, effective gate oxide thickness tc and effective gate electrode area D, and their combination are applied for a new analysis method of Fowler-Nordheim (F-N) tunneling characteristics in MOS capacitor having oxide thickness fluctuation. This method considering the conduction properties of F-N tunneling characteristics correlates its characteristics to the oxide reliability. These indicators quantified with the influence of the oxide thickness fluctuation can provide the net values of the electric field and the current density on the gate oxide. This new analysis method will lead to reducing the evaluation time for the reliability assessment.


1995 ◽  
Vol 35 (3) ◽  
pp. 603-608 ◽  
Author(s):  
S.R. Anderson ◽  
R.D. Schrimpf ◽  
K.F. Galloway ◽  
J.L. Titus

1998 ◽  
Vol 38 (2) ◽  
pp. 255-258 ◽  
Author(s):  
G Ghidini ◽  
C Clementi ◽  
D Drera ◽  
F Maugain

2021 ◽  
Author(s):  
Tianshi Liu ◽  
Shengnan Zhu ◽  
Michael Jin ◽  
Limeng Shi ◽  
Marvin H. White ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document