Fracture Behavior of Micro-Sized Specimens with Fatigue Pre-Crack Prepared from a Ni-P Amorphous Alloy Thin Film

2008 ◽  
pp. 72-72-10 ◽  
Author(s):  
K Takashima ◽  
M Shimojo ◽  
Y Higo ◽  
MV Swain
2001 ◽  
Vol 695 ◽  
Author(s):  
K. Takashima ◽  
R. Tarumi ◽  
Y. Higo

ABSTRACTFracture behavior of micro-sized cantilever beam type specimens prepared from an electroless deposited Ni-P amorphous alloy thin film has been investigated at ambient and elevated temperatures. Cantilever beam type specimens with dimensions of 10 x 12 x 50 μm3 were prepared from an electroless deposited Ni-P amorphous alloy thin film and notches were introduced by focused ion beam machining. Fatigue pre-cracks were introduced ahead of the notches. The introduction of fatigue pre-crack and fracture toughness tests were carried out using a mechanical testing machine for micro-sized specimens. The temperature of the specimen was controlled from room temperature to 473 K using a newly developed heating system. Compared with room temperature, fracture toughness increased approximately 40 % at 373 K but decreased 19 % at 473 K. The increase of fracture toughness at 373 K is considered to be related with the formation of nano-sized crystals and the decrease of fracture toughness at 473 K is considered to be due to the growth of crystals. It is required to consider the fracture behavior obtained in this investigation when designing actual MEMS devices using electroless deposited amorphous films.


2000 ◽  
Vol 657 ◽  
Author(s):  
Kazuki Takashima ◽  
Akio Ogura ◽  
Yusuke Ichikawa ◽  
Yakichi Higo

ABSTRACTFracture tests have been carried out for an electroless deposited Ni-P amorphous alloy thin film with different crack growth directions. Cantilever beam type specimens with dimensions of 10 × 10 × 50 μm3 were prepared from a Ni-P amorphous thin film and notches with different directions, which are perpendicular and parallel to the deposition growth direction, were introduced by focused ion beam machining. Fatigue pre-cracks were introduced ahead of the notches. Fracture tests were performed using a mechanical testing machine for micro-sized specimens. Fracture behavior is different between the two types of specimens. As KIC values were not obtained because the criteria of plane strain were not satisfied for this size of the specimen, the provisional fracture toughness KQ values were determined. The KQ value of the specimen with crack propagation direction being perpendicular to the deposition growth direction was 4.2 MPam1/2, while that with crack propagation direction being parallel to the deposition growth direction was 7.3 MPam1/2. This result suggests that the electroless deposited Ni-P amorphous alloy thin film has anisotropic fracture properties.


2009 ◽  
Vol 34 (4) ◽  
pp. 627-629
Author(s):  
Tokujiro Yamamoto ◽  
Kouichi Hayashi ◽  
Kosuke Suzuki ◽  
Masahisa Ito ◽  
Hisamichi Kimura ◽  
...  

2005 ◽  
Vol 54 (10) ◽  
pp. 1012-1015 ◽  
Author(s):  
Akira SHIBATA ◽  
Ryuichi TARUMI ◽  
Hirotsugu OGI ◽  
Masahiko HIRAO ◽  
Kazuki TAKASHIMA ◽  
...  

2007 ◽  
Vol 101 (5) ◽  
pp. 053519 ◽  
Author(s):  
Ryuichi Tarumi ◽  
Akira Shibata ◽  
Hirotsugu Ogi ◽  
Masahiko Hirao ◽  
Kazuki Takashima ◽  
...  

2012 ◽  
Vol 30 ◽  
pp. 100-103
Author(s):  
Kana Takenaka ◽  
Noriko Saidoh ◽  
Nobuyuki Nishiyama ◽  
Manabu Ishimaru ◽  
Akihisa Inoue

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